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- W2034150944 abstract "Carbon nanotubes (CNTs), due to their unique electronic and extraordinary mechanical properties, have been receiving much attention for a wide variety of applications. Recently, plasma enhanced chemical vapour deposition (PECVD) has emerged as a key growth technique to produce vertically-aligned nanotubes. This paper reviews various plasma sources currently used in CNT growth, catalyst preparation and growth results. Since the technology is in its early stages, there is a general lack of understanding of growth mechanisms, the role of the plasma itself, and the identity of key species responsible for growth. This review is aimed at the low temperature plasma research community that has successfully addressed such issues, through plasma and surface diagnostics and modelling, in semiconductor processing and diamond thin film growth." @default.
- W2034150944 created "2016-06-24" @default.
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- W2034150944 date "2003-04-02" @default.
- W2034150944 modified "2023-10-10" @default.
- W2034150944 title "Carbon nanotube growth by PECVD: a review" @default.
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- W2034150944 doi "https://doi.org/10.1088/0963-0252/12/2/312" @default.
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