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- W2034157338 abstract "A novel cylinder (Patent Pending) for solid sources, featuring the absence of a dip tube and the addition of a sintered, stainless-steel frit, has been evaluated and compared to conventional designs. For solid TMIn (which has a well-known problem with vapor stability) packaged in a single cylinder, a stable, saturated concentration resulted for more than 93 g of a 100-g cylinder fill. The optimum parameter space for this design has been explored, and factors controlling performance are identified. Other solid compounds, CP2Mg and CBr4, have also been tested, and performance results are similar to TMIn." @default.
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- W2034157338 date "2000-12-01" @default.
- W2034157338 modified "2023-09-25" @default.
- W2034157338 title "A study of cylinder design for solid OMVPE sources" @default.
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- W2034157338 doi "https://doi.org/10.1016/s0022-0248(00)00791-0" @default.
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