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- W2034172786 abstract "An approach to spatial frequency filtering is described where 'zero order' mask diffraction information is reduced, enhancing imaging performance. This method of resolution enhancement is accomplished by filtering in an alternative pupil plane of the objective lens, specifically near or beyond the mask pellicle plane. By introducing an angular specific transmission filter into the Fraunhofer diffraction field of the mask, user accessibility is introduced, allowing for a practical approach to frequency filtering. This is accomplished using a specifically designed interference filter coated over a transparent substrate. Analysis of the approach is given along with result from experiments for contact features using a full field high NA 148nm exposure tool." @default.
- W2034172786 created "2016-06-24" @default.
- W2034172786 creator A5022838965 @default.
- W2034172786 creator A5061544428 @default.
- W2034172786 date "2000-07-05" @default.
- W2034172786 modified "2023-09-23" @default.
- W2034172786 title "Spatial frequency filtering in the pellicle plane" @default.
- W2034172786 doi "https://doi.org/10.1117/12.389014" @default.
- W2034172786 hasPublicationYear "2000" @default.
- W2034172786 type Work @default.
- W2034172786 sameAs 2034172786 @default.
- W2034172786 citedByCount "3" @default.
- W2034172786 countsByYear W20341727862014 @default.
- W2034172786 countsByYear W20341727862020 @default.
- W2034172786 crossrefType "proceedings-article" @default.
- W2034172786 hasAuthorship W2034172786A5022838965 @default.
- W2034172786 hasAuthorship W2034172786A5061544428 @default.
- W2034172786 hasConcept C100921725 @default.
- W2034172786 hasConcept C106131492 @default.
- W2034172786 hasConcept C120665830 @default.
- W2034172786 hasConcept C121332964 @default.
- W2034172786 hasConcept C121475858 @default.
- W2034172786 hasConcept C127162648 @default.
- W2034172786 hasConcept C15336307 @default.
- W2034172786 hasConcept C17825722 @default.
- W2034172786 hasConcept C207114421 @default.
- W2034172786 hasConcept C2524010 @default.
- W2034172786 hasConcept C2776663829 @default.
- W2034172786 hasConcept C31972630 @default.
- W2034172786 hasConcept C32022120 @default.
- W2034172786 hasConcept C33923547 @default.
- W2034172786 hasConcept C41008148 @default.
- W2034172786 hasConcept C6260449 @default.
- W2034172786 hasConcept C76155785 @default.
- W2034172786 hasConceptScore W2034172786C100921725 @default.
- W2034172786 hasConceptScore W2034172786C106131492 @default.
- W2034172786 hasConceptScore W2034172786C120665830 @default.
- W2034172786 hasConceptScore W2034172786C121332964 @default.
- W2034172786 hasConceptScore W2034172786C121475858 @default.
- W2034172786 hasConceptScore W2034172786C127162648 @default.
- W2034172786 hasConceptScore W2034172786C15336307 @default.
- W2034172786 hasConceptScore W2034172786C17825722 @default.
- W2034172786 hasConceptScore W2034172786C207114421 @default.
- W2034172786 hasConceptScore W2034172786C2524010 @default.
- W2034172786 hasConceptScore W2034172786C2776663829 @default.
- W2034172786 hasConceptScore W2034172786C31972630 @default.
- W2034172786 hasConceptScore W2034172786C32022120 @default.
- W2034172786 hasConceptScore W2034172786C33923547 @default.
- W2034172786 hasConceptScore W2034172786C41008148 @default.
- W2034172786 hasConceptScore W2034172786C6260449 @default.
- W2034172786 hasConceptScore W2034172786C76155785 @default.
- W2034172786 hasLocation W20341727861 @default.
- W2034172786 hasOpenAccess W2034172786 @default.
- W2034172786 hasPrimaryLocation W20341727861 @default.
- W2034172786 hasRelatedWork W1993785770 @default.
- W2034172786 hasRelatedWork W2032340113 @default.
- W2034172786 hasRelatedWork W2040293365 @default.
- W2034172786 hasRelatedWork W2115611442 @default.
- W2034172786 hasRelatedWork W2171796496 @default.
- W2034172786 hasRelatedWork W2506577817 @default.
- W2034172786 hasRelatedWork W2762189025 @default.
- W2034172786 hasRelatedWork W2898812956 @default.
- W2034172786 hasRelatedWork W2904424649 @default.
- W2034172786 hasRelatedWork W3111235545 @default.
- W2034172786 hasRelatedWork W3194441578 @default.
- W2034172786 hasRelatedWork W3199701126 @default.
- W2034172786 hasRelatedWork W3208939065 @default.
- W2034172786 hasRelatedWork W1586180628 @default.
- W2034172786 hasRelatedWork W2074595106 @default.
- W2034172786 hasRelatedWork W2187758037 @default.
- W2034172786 hasRelatedWork W235867926 @default.
- W2034172786 hasRelatedWork W2405271042 @default.
- W2034172786 hasRelatedWork W2976681754 @default.
- W2034172786 hasRelatedWork W3154961250 @default.
- W2034172786 isParatext "false" @default.
- W2034172786 isRetracted "false" @default.
- W2034172786 magId "2034172786" @default.
- W2034172786 workType "article" @default.