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- W2034172792 abstract "The feasibility of fabricating buried (embedded or subsurface) microstructures between silicon and silicon oxide using laser-assisted chemical etching (LACE) in chlorine atmosphere is demonstrated in this article. An associated LACE ablation model and sample calculations based on one-dimensional thermal analysis and chemical kinetics are presented. A strategy for optimizing the laser process for 3D micromachining is outlined. Potential applications of such fabricated microstructures include microfluidic MEMS for transducers and electronic cooling." @default.
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- W2034172792 date "2002-07-18" @default.
- W2034172792 modified "2023-09-24" @default.
- W2034172792 title "Laser-assisted chemical etching for embedded microchannels and overhanging microstructures on Si/SiO2 substrates" @default.
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- W2034172792 doi "https://doi.org/10.2351/1.1493767" @default.
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