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- W2034177318 abstract "An optical measurement system and method for out-of-plane motion testing of micro-structures is presented. Based on a Mirau type microscopic interferometer, the system adopts time-averaged interferometry to realize the measurement of the out-of-plane dynamic properties of movable micro-structures. For mapping the zero-order Bessel function modulating the contrast of two-beam interference fringes, a four-step phase-shift technique is applied. An experiment on a micro-resonator demonstrates that out-of-plane motion can be measured at any frequency with a lateral resolution in the micrometer range and a detection limit around 5nm." @default.
- W2034177318 created "2016-06-24" @default.
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- W2034177318 date "2007-01-01" @default.
- W2034177318 modified "2023-09-26" @default.
- W2034177318 title "Rapid Measuring Method of Micro-Motion Based on Time-Averaged Microscopic Interferometry" @default.
- W2034177318 doi "https://doi.org/10.1115/mnc2007-21020" @default.
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