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• W2034183299 endingPage "3888" @default.
• W2034183299 startingPage "3883" @default.
• W2034183299 abstract "Bismuth titanate thin films were prepared by atomic layer deposition. Bismuth tris(bis(trimethylsilyl)amide) Bi(N(SiMe3)2)3 was used as the bismuth and titanium methoxide Ti(OMe)4 as the titanium precursor while water was used as the oxygen source. Self-limited growth of Bi−Ti−O films took place at a deposition temperature of 190 °C. The as-deposited Bi−Ti−O films showed surface morphologies atypical for amorphous ALD films, which may point either to partial bismuth reduction or to weak ordering of the deposited Bi−Ti−O during film growth. The Bi−Ti−O films postannealed at 750 °C crystallized to either pyrochlore Bi2Ti2O7-type structures, mixtures of the pyrochlore- and layered perovskite Bi4Ti3O12 phases, or phase-pure Bi4Ti3O12 depending on the Bi/(Bi + Ti) ratio in the film. Slightly Bi-rich films were found to result in the phase-pure Bi4Ti3O12. After postannealing in O2 at 600 °C 51 nm thick films deposited on Pt/SiO2/Si substrates had a remanent polarization Pr and coercive field Ec of 0.5 μC/cm2 and 24 kV/cm, respectively. The leakage current density was below 1 μA/cm2 up to ±1.6 V applied bias." @default.
• W2034183299 created "2016-06-24" @default.
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• W2034183299 date "2006-07-04" @default.
• W2034183299 modified "2023-10-03" @default.
• W2034183299 title "Atomic Layer Deposition of Ferroelectric Bismuth Titanate Bi₄Ti₃O₁₂ Thin Films" @default.
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• W2034183299 doi "https://doi.org/10.1021/cm060966v" @default.
• W2034183299 hasPublicationYear "2006" @default.
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