Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034188734> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2034188734 abstract "Monitoring of air-quality it is a major task nowadays as the emission of pollutant gases increases particularly in urban areas. Ozone (O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> ) is a significant toxic pollutant and presents health risks. We have developed ozone sensors using a surface acoustic wave (SAW) based devices. The sensors structure consists of a lithium tantalate piezoelectric (LiTaO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> ) substrate with silicon nitride (SiN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> ) intermediate layer deposited by R.F. magnetron sputtering and e-beam evaporation techniques. A 100 nm thin film of indium oxide (InO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> ) deposited by R.F. magnetron sputtering provides the selectivity towards O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> . This paper presents a comparative study of the sensors performance in terms of response time, recovery time and response magnitude as a function of operational temperature. Exceptionally large frequency shift as high as 56 kHz was observed for O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> concentrations as low as 50 parts per billion (ppb) in air. Microstructural characterization of the InO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> thin films by atomic force microscopy (AFM) is also presented." @default.
- W2034188734 created "2016-06-24" @default.
- W2034188734 creator A5023222825 @default.
- W2034188734 creator A5038369523 @default.
- W2034188734 creator A5046776050 @default.
- W2034188734 creator A5067220816 @default.
- W2034188734 creator A5091800995 @default.
- W2034188734 date "2005-11-01" @default.
- W2034188734 modified "2023-09-27" @default.
- W2034188734 title "Ozone Sensors based on Layered SAW Devices with: InOx/SiNx/36° YX LiTaO3 Structure" @default.
- W2034188734 cites W1505466570 @default.
- W2034188734 cites W1545010337 @default.
- W2034188734 cites W1976978628 @default.
- W2034188734 cites W1997259137 @default.
- W2034188734 cites W2006234988 @default.
- W2034188734 cites W2019506100 @default.
- W2034188734 cites W2027487335 @default.
- W2034188734 cites W2075513984 @default.
- W2034188734 cites W2084325174 @default.
- W2034188734 cites W2094297961 @default.
- W2034188734 cites W2121036006 @default.
- W2034188734 cites W2150800238 @default.
- W2034188734 cites W2154991346 @default.
- W2034188734 cites W2165885955 @default.
- W2034188734 cites W2184286878 @default.
- W2034188734 cites W60284435 @default.
- W2034188734 doi "https://doi.org/10.1109/tencon.2005.301325" @default.
- W2034188734 hasPublicationYear "2005" @default.
- W2034188734 type Work @default.
- W2034188734 sameAs 2034188734 @default.
- W2034188734 citedByCount "0" @default.
- W2034188734 crossrefType "proceedings-article" @default.
- W2034188734 hasAuthorship W2034188734A5023222825 @default.
- W2034188734 hasAuthorship W2034188734A5038369523 @default.
- W2034188734 hasAuthorship W2034188734A5046776050 @default.
- W2034188734 hasAuthorship W2034188734A5067220816 @default.
- W2034188734 hasAuthorship W2034188734A5091800995 @default.
- W2034188734 hasBestOaLocation W20341887342 @default.
- W2034188734 hasConcept C113196181 @default.
- W2034188734 hasConcept C171250308 @default.
- W2034188734 hasConcept C178790620 @default.
- W2034188734 hasConcept C185592680 @default.
- W2034188734 hasConcept C19067145 @default.
- W2034188734 hasConcept C192562407 @default.
- W2034188734 hasConcept C22423302 @default.
- W2034188734 hasConcept C61427134 @default.
- W2034188734 hasConceptScore W2034188734C113196181 @default.
- W2034188734 hasConceptScore W2034188734C171250308 @default.
- W2034188734 hasConceptScore W2034188734C178790620 @default.
- W2034188734 hasConceptScore W2034188734C185592680 @default.
- W2034188734 hasConceptScore W2034188734C19067145 @default.
- W2034188734 hasConceptScore W2034188734C192562407 @default.
- W2034188734 hasConceptScore W2034188734C22423302 @default.
- W2034188734 hasConceptScore W2034188734C61427134 @default.
- W2034188734 hasLocation W20341887341 @default.
- W2034188734 hasLocation W20341887342 @default.
- W2034188734 hasOpenAccess W2034188734 @default.
- W2034188734 hasPrimaryLocation W20341887341 @default.
- W2034188734 hasRelatedWork W1980030282 @default.
- W2034188734 hasRelatedWork W1996251975 @default.
- W2034188734 hasRelatedWork W2009010751 @default.
- W2034188734 hasRelatedWork W2316948141 @default.
- W2034188734 hasRelatedWork W2334467092 @default.
- W2034188734 hasRelatedWork W2350109348 @default.
- W2034188734 hasRelatedWork W2379157523 @default.
- W2034188734 hasRelatedWork W3034790901 @default.
- W2034188734 hasRelatedWork W4231961096 @default.
- W2034188734 hasRelatedWork W4363610068 @default.
- W2034188734 isParatext "false" @default.
- W2034188734 isRetracted "false" @default.
- W2034188734 magId "2034188734" @default.
- W2034188734 workType "article" @default.