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- W2034190148 abstract "Through a joint effort between Texas Instruments (TI) and Olin Aerospace Company (OAC), a supersonic hydrogen arc jet for high-growth-rate chemical vapor deposition (CVD) of thick layers of optical quality diamond has been developed for flat substrates as large as 8 inches in diameter and for hemispherical domes measuring 2.5 inches in diameter. An overview of this deposition system is presented, along with optical and structural analysis of the subsequently deposited material. Efforts to monitor the plasma chemistry, along with in-depth computer modeling of the gas phase chemistry and hydrodynamics of this supersonic jet, in order to produce a higher-growth-rate process while maintaining optical quality, are discussed. The current status of the overall performance of this deposition system and the resultant material are presented in relation to the requirements for high-speed-missile domes and windows." @default.
- W2034190148 created "2016-06-24" @default.
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- W2034190148 date "1994-09-28" @default.
- W2034190148 modified "2023-09-23" @default.
- W2034190148 title "<title>Optical-quality high-growth-rate, arc-jet CVD diamond</title>" @default.
- W2034190148 doi "https://doi.org/10.1117/12.187338" @default.
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