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- W2034190846 abstract "Rutherford backscattering (RBS) has been used to study the redistribution of ion-implanted mercury and the reordering of implantation damage during Rapid Thermal Annealing (RTA) of Ga 0.47 In 0.53 As epilayers and bulk InP. Implantation at 200°C prevents amorphous layer formation and reduces the extent of Hg redistribution in both materials. Si 3 N 4 and phosphosilicate glass (PSG) are compared as encapsulants for InP; it is suggested that silicon indiffusion enhanced by radiation damage may be the reason why p-type activity has only been seen for 200°C implanted material." @default.
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- W2034190846 date "1987-09-01" @default.
- W2034190846 modified "2023-09-28" @default.
- W2034190846 title "Redistribution of Ion-Implanted Mercury During Rapid Thermal Annealing of Ga 0.47 In 0.53 As and InP" @default.
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