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- W2034194441 abstract "Elastic binary collisions of keV rare gas ions with surface atoms provide energy spectra characteristics of the masses of the scattering centers. This information can be used to determine the composition of the outermost atomic layer of a solid, regardless of its conductivity. Since the primary ion beam removes at the same time the outer layers of the sample by sputtering, concentration profiles of major and minor constituents are readily obtained down to a depth of several thousand Å. In the case of insulators, positive charge-up is avoided by flooding the sample with electrons. The size of a given scattered peak depends on a number of parameters, including the scattering cross section, a neutralization factor, and geometrical considerations. Thus, elemental sensitivities are not readily predictable, but quantitative analyses are nevertheless possible with the help of calibration samples. Except for lattice geometry, matrix effects such as the enhancement of elemental sensitivities by oxygen encountered in secondary ion mass spectrometry, do not present a problem. In the instruments presently in use, the detected scattered signal comes from an area several hundred μm wide and several mm long; thus the data obtained represent an average, rather than a localized, composition. However, when appropriate experimental conditions are employed, only about one monolayer will be consumed during an analysis, thus making this a true “surface” method. Results will be given for different types of problems resolved by this technique, and an up-to-date bibliography presented." @default.
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- W2034194441 date "1973-12-01" @default.
- W2034194441 modified "2023-09-27" @default.
- W2034194441 title "Ion scattering spectrometry below 10 keV" @default.
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- W2034194441 doi "https://doi.org/10.1016/0040-6090(73)90023-0" @default.
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