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• W2034194630 abstract "There have been tremendous interests about the fabrication of the Au plasmonic nanopore due to its capability of the nanosize optical biosensor. We have investigated the influence of low energy electron beam irradiation on an Au nanomembrane during Au nanopore formation. In this report, the influence of electron beam irradiation on the Au nanopore formation will be reported. The nanopores on the 200 nm thick Au membrane were initially fabricated using focused ion beam (FIB) and high energy electron beam techniques such as transmission electron microscopy (TEM), and field emission scanning electron microscopy (FESEM). During high energy electron beam by using TEM, either a “shrinking” or a “opening” phenomenon is reported dependent on the ratio of thickness to aperture diameter. However, for a FESEM electron beam irradiation, a <i>shrinking phenomenon </i>is always observed. In this report, the nanopore formation during FESEM electron beam irradiation will be reported depending upon energy absorption and thermal diffusivity." @default.
• W2034194630 created "2016-06-24" @default.
• W2034194630 creator A5012871463 @default.
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• W2034194630 date "2015-03-11" @default.
• W2034194630 modified "2023-09-27" @default.
• W2034194630 title "Investigation of electron beam irradiation effect on pore formation for single molecule bio-sensor fabrication" @default.
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• W2034194630 doi "https://doi.org/10.1117/12.2075906" @default.
• W2034194630 hasPublicationYear "2015" @default.
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