Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034214952> ?p ?o ?g. }
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- W2034214952 endingPage "299" @default.
- W2034214952 startingPage "293" @default.
- W2034214952 abstract "Nanoimprint lithography (NIL) has developed from an emerging nanoreplication technology into a mature and industrially viable manufacturing technology. It is now by far the fastest and most cost-efficient nanoreplication method available. This technology has been successfully implemented in the manufacturing of High Brightness LED’s. However, manufacturing of HBLED’s in high volume using nanoimprint lithography faces a few particular challenges. Perhaps the most significant is to produce perfectly imprinted nanostructures on the epitaxially grown substrates with high quality and yield. This is especially important since the substrates are expensive and since the imprint step is close to the end of the production process. This means that the value of the processed substrates is very high. In this work, 8000 imprints were produced. Measured data from the imprinted substrates shows consistent results. It is also shown that the 8000 imprints have been performed using the same stamp without significant degradation. After 8000 imprints, the yield from the nanoimprint lithography step is 99.15%." @default.
- W2034214952 created "2016-06-24" @default.
- W2034214952 creator A5001253883 @default.
- W2034214952 creator A5010571908 @default.
- W2034214952 creator A5023377204 @default.
- W2034214952 creator A5063566438 @default.
- W2034214952 creator A5090344089 @default.
- W2034214952 date "2011-03-01" @default.
- W2034214952 modified "2023-10-14" @default.
- W2034214952 title "High volume nanoimprint lithography on III/V substrates: Imprint fidelity and stamp lifetime" @default.
- W2034214952 cites W1968925204 @default.
- W2034214952 cites W1970007725 @default.
- W2034214952 cites W2003164958 @default.
- W2034214952 cites W2009294596 @default.
- W2034214952 cites W2063614091 @default.
- W2034214952 cites W2080604200 @default.
- W2034214952 cites W2150235412 @default.
- W2034214952 cites W2170581783 @default.
- W2034214952 doi "https://doi.org/10.1016/j.mee.2010.11.024" @default.
- W2034214952 hasPublicationYear "2011" @default.
- W2034214952 type Work @default.
- W2034214952 sameAs 2034214952 @default.
- W2034214952 citedByCount "31" @default.
- W2034214952 countsByYear W20342149522012 @default.
- W2034214952 countsByYear W20342149522013 @default.
- W2034214952 countsByYear W20342149522014 @default.
- W2034214952 countsByYear W20342149522015 @default.
- W2034214952 countsByYear W20342149522016 @default.
- W2034214952 countsByYear W20342149522017 @default.
- W2034214952 countsByYear W20342149522018 @default.
- W2034214952 countsByYear W20342149522019 @default.
- W2034214952 countsByYear W20342149522020 @default.
- W2034214952 countsByYear W20342149522021 @default.
- W2034214952 countsByYear W20342149522022 @default.
- W2034214952 countsByYear W20342149522023 @default.
- W2034214952 crossrefType "journal-article" @default.
- W2034214952 hasAuthorship W2034214952A5001253883 @default.
- W2034214952 hasAuthorship W2034214952A5010571908 @default.
- W2034214952 hasAuthorship W2034214952A5023377204 @default.
- W2034214952 hasAuthorship W2034214952A5063566438 @default.
- W2034214952 hasAuthorship W2034214952A5090344089 @default.
- W2034214952 hasConcept C136525101 @default.
- W2034214952 hasConcept C142724271 @default.
- W2034214952 hasConcept C163581340 @default.
- W2034214952 hasConcept C171250308 @default.
- W2034214952 hasConcept C192562407 @default.
- W2034214952 hasConcept C200274948 @default.
- W2034214952 hasConcept C204223013 @default.
- W2034214952 hasConcept C204787440 @default.
- W2034214952 hasConcept C2777046567 @default.
- W2034214952 hasConcept C2779227376 @default.
- W2034214952 hasConcept C49040817 @default.
- W2034214952 hasConcept C53524968 @default.
- W2034214952 hasConcept C71924100 @default.
- W2034214952 hasConceptScore W2034214952C136525101 @default.
- W2034214952 hasConceptScore W2034214952C142724271 @default.
- W2034214952 hasConceptScore W2034214952C163581340 @default.
- W2034214952 hasConceptScore W2034214952C171250308 @default.
- W2034214952 hasConceptScore W2034214952C192562407 @default.
- W2034214952 hasConceptScore W2034214952C200274948 @default.
- W2034214952 hasConceptScore W2034214952C204223013 @default.
- W2034214952 hasConceptScore W2034214952C204787440 @default.
- W2034214952 hasConceptScore W2034214952C2777046567 @default.
- W2034214952 hasConceptScore W2034214952C2779227376 @default.
- W2034214952 hasConceptScore W2034214952C49040817 @default.
- W2034214952 hasConceptScore W2034214952C53524968 @default.
- W2034214952 hasConceptScore W2034214952C71924100 @default.
- W2034214952 hasIssue "3" @default.
- W2034214952 hasLocation W20342149521 @default.
- W2034214952 hasOpenAccess W2034214952 @default.
- W2034214952 hasPrimaryLocation W20342149521 @default.
- W2034214952 hasRelatedWork W1980261913 @default.
- W2034214952 hasRelatedWork W2027494083 @default.
- W2034214952 hasRelatedWork W2062151620 @default.
- W2034214952 hasRelatedWork W2363991779 @default.
- W2034214952 hasRelatedWork W2478487396 @default.
- W2034214952 hasRelatedWork W2518797246 @default.
- W2034214952 hasRelatedWork W2792297505 @default.
- W2034214952 hasRelatedWork W2914219921 @default.
- W2034214952 hasRelatedWork W4211104017 @default.
- W2034214952 hasRelatedWork W4307818291 @default.
- W2034214952 hasVolume "88" @default.
- W2034214952 isParatext "false" @default.
- W2034214952 isRetracted "false" @default.
- W2034214952 magId "2034214952" @default.
- W2034214952 workType "article" @default.