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- W2034223691 endingPage "1802" @default.
- W2034223691 startingPage "1800" @default.
- W2034223691 abstract "Selectively doped inverted heterojunctions containing a two-dimensional electron gas were used as a sensitive vehicle for monitoring dry processing damage. We found that the electron sheet concentration, strongly dependent on the total number of carriers in the GaAs cap layer, and the mobilities were significantly depressed even for very short exposures to low-voltage helium plasmas. Argon, which caused less degradation than helium, was found to increase the sheet carrier concentration and hence the mobility after prolonged exposure. The damage mechanism responsible for the carrier loss in both cases is most likely the production of traps. The subsequent carrier increase seen for the argon case is probably attributable to the creation of a very thin donorlike damage layer on the surface of the GaAs cap layer." @default.
- W2034223691 created "2016-06-24" @default.
- W2034223691 creator A5000073674 @default.
- W2034223691 creator A5008483233 @default.
- W2034223691 creator A5075541778 @default.
- W2034223691 date "1989-02-15" @default.
- W2034223691 modified "2023-09-23" @default.
- W2034223691 title "Inert gas reactive ion etching damage to GaAs using inverted heterojunctions" @default.
- W2034223691 cites W1978730076 @default.
- W2034223691 cites W1979872362 @default.
- W2034223691 cites W1989946206 @default.
- W2034223691 cites W2001187850 @default.
- W2034223691 cites W2031890882 @default.
- W2034223691 cites W2040514150 @default.
- W2034223691 cites W2054117851 @default.
- W2034223691 cites W2064845596 @default.
- W2034223691 cites W2090342523 @default.
- W2034223691 doi "https://doi.org/10.1063/1.342910" @default.
- W2034223691 hasPublicationYear "1989" @default.
- W2034223691 type Work @default.
- W2034223691 sameAs 2034223691 @default.
- W2034223691 citedByCount "11" @default.
- W2034223691 crossrefType "journal-article" @default.
- W2034223691 hasAuthorship W2034223691A5000073674 @default.
- W2034223691 hasAuthorship W2034223691A5008483233 @default.
- W2034223691 hasAuthorship W2034223691A5075541778 @default.
- W2034223691 hasConcept C100460472 @default.
- W2034223691 hasConcept C107872376 @default.
- W2034223691 hasConcept C113196181 @default.
- W2034223691 hasConcept C127413603 @default.
- W2034223691 hasConcept C1291036 @default.
- W2034223691 hasConcept C154256306 @default.
- W2034223691 hasConcept C159985019 @default.
- W2034223691 hasConcept C178790620 @default.
- W2034223691 hasConcept C185592680 @default.
- W2034223691 hasConcept C192562407 @default.
- W2034223691 hasConcept C24326235 @default.
- W2034223691 hasConcept C2779227376 @default.
- W2034223691 hasConcept C2779679103 @default.
- W2034223691 hasConcept C49040817 @default.
- W2034223691 hasConcept C546029482 @default.
- W2034223691 hasConcept C547737533 @default.
- W2034223691 hasConcept C55766333 @default.
- W2034223691 hasConcept C57863236 @default.
- W2034223691 hasConcept C79794668 @default.
- W2034223691 hasConceptScore W2034223691C100460472 @default.
- W2034223691 hasConceptScore W2034223691C107872376 @default.
- W2034223691 hasConceptScore W2034223691C113196181 @default.
- W2034223691 hasConceptScore W2034223691C127413603 @default.
- W2034223691 hasConceptScore W2034223691C1291036 @default.
- W2034223691 hasConceptScore W2034223691C154256306 @default.
- W2034223691 hasConceptScore W2034223691C159985019 @default.
- W2034223691 hasConceptScore W2034223691C178790620 @default.
- W2034223691 hasConceptScore W2034223691C185592680 @default.
- W2034223691 hasConceptScore W2034223691C192562407 @default.
- W2034223691 hasConceptScore W2034223691C24326235 @default.
- W2034223691 hasConceptScore W2034223691C2779227376 @default.
- W2034223691 hasConceptScore W2034223691C2779679103 @default.
- W2034223691 hasConceptScore W2034223691C49040817 @default.
- W2034223691 hasConceptScore W2034223691C546029482 @default.
- W2034223691 hasConceptScore W2034223691C547737533 @default.
- W2034223691 hasConceptScore W2034223691C55766333 @default.
- W2034223691 hasConceptScore W2034223691C57863236 @default.
- W2034223691 hasConceptScore W2034223691C79794668 @default.
- W2034223691 hasIssue "4" @default.
- W2034223691 hasLocation W20342236911 @default.
- W2034223691 hasOpenAccess W2034223691 @default.
- W2034223691 hasPrimaryLocation W20342236911 @default.
- W2034223691 hasRelatedWork W182085513 @default.
- W2034223691 hasRelatedWork W1964216914 @default.
- W2034223691 hasRelatedWork W2088337834 @default.
- W2034223691 hasRelatedWork W2382785533 @default.
- W2034223691 hasRelatedWork W2414702076 @default.
- W2034223691 hasRelatedWork W2583936737 @default.
- W2034223691 hasRelatedWork W2762634485 @default.
- W2034223691 hasRelatedWork W418482008 @default.
- W2034223691 hasRelatedWork W5816029 @default.
- W2034223691 hasRelatedWork W2497263041 @default.
- W2034223691 hasVolume "65" @default.
- W2034223691 isParatext "false" @default.
- W2034223691 isRetracted "false" @default.
- W2034223691 magId "2034223691" @default.
- W2034223691 workType "article" @default.