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- W2034229698 abstract "Integrated optical semiconductor sensors are a promising technology for both lab-on-a-chip and molecular imagingapplications due to their low cost, small size, high sensitivity, and flexible designs. We present the design and fabricationof a GaAs-based monolithically integrated fluorescence sensor incorporating 670nm VCSELs and PIN photodetectors.This is the first integrated, VCSEL-based fluorescence sensor with excitation at a far-red wavelength and is specificallydesigned for in vivo sensing applications. In addition, we discuss considerations to simultaneously achieve high powerVCSELs and low dark current PIN photodetectors required for sensitive fluorescence detection. These fabricated sensorsincorporate 670nm VCSELs emitting 2.0mW at room temperature (RT) with adjacent detectors exhibiting RT dark lessthan 2pA/mm2 (100mV reverse bias). Fluorescence emission filters suitable for transmitting Cy5.5 fluorescent dyeemission were integrated with the photodetectors. The sensor detects Cy5.5 molecules in vitro at 5nM concentration withlinear response for concentrations up to 25μM. These miniature sensors are suitable for portable diagnostic assays and invivo rodent studies." @default.
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- W2034229698 date "2010-02-11" @default.
- W2034229698 modified "2023-09-23" @default.
- W2034229698 title "Fabrication of an integrated 670nm VCSEL-based sensor for miniaturized fluorescence sensing" @default.
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- W2034229698 doi "https://doi.org/10.1117/12.842096" @default.
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