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- W2034283752 startingPage "3374" @default.
- W2034283752 abstract "The surface wave velocity of the SiC layer on the Si substrate was investigated by the Brillouin scattering method. The quasi Rayleigh wave on the SiC layer was clearly observed, showing velocity dependence on the crystalline structure." @default.
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- W2034283752 date "2002-05-30" @default.
- W2034283752 modified "2023-09-24" @default.
- W2034283752 title "Nondestructive Evaluation of SiC Layer by Brillouin Scattering Method" @default.
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- W2034283752 doi "https://doi.org/10.1143/jjap.41.3374" @default.
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