Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034292291> ?p ?o ?g. }
- W2034292291 endingPage "173503" @default.
- W2034292291 startingPage "173503" @default.
- W2034292291 abstract "Black Silicon nanostructures are fabricated by Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) in a gas mixture of SF6 and O2 at non-cryogenic temperatures. The structure evolution and the dependency of final structure geometry on the main processing parameters gas composition and working pressure are investigated and explained comprehensively. The optical properties of the produced Black Silicon structures, a distinct antireflection and light trapping effect, are resolved by optical spectroscopy and conclusively illustrated by optical simulations of accurate models of the real nanostructures. By that the structure sidewall roughness is found to be critical for an elevated reflectance of Black Silicon resulting from non-optimized etching processes. By analysis of a multitude of structures fabricated under different conditions, approximate limits for the range of feasible nanostructure geometries are derived. Finally, the technological applicability of Black Silicon fabrication by ICP-RIE is discussed." @default.
- W2034292291 created "2016-06-24" @default.
- W2034292291 creator A5036597067 @default.
- W2034292291 creator A5037429792 @default.
- W2034292291 creator A5045742638 @default.
- W2034292291 creator A5069441090 @default.
- W2034292291 creator A5082470249 @default.
- W2034292291 creator A5090054917 @default.
- W2034292291 date "2014-11-07" @default.
- W2034292291 modified "2023-10-14" @default.
- W2034292291 title "The structural and optical properties of black silicon by inductively coupled plasma reactive ion etching" @default.
- W2034292291 cites W1506673119 @default.
- W2034292291 cites W1565488047 @default.
- W2034292291 cites W1622645825 @default.
- W2034292291 cites W1895723034 @default.
- W2034292291 cites W1967678538 @default.
- W2034292291 cites W1968022893 @default.
- W2034292291 cites W1968446392 @default.
- W2034292291 cites W1978758763 @default.
- W2034292291 cites W1982221527 @default.
- W2034292291 cites W1985261292 @default.
- W2034292291 cites W1992157825 @default.
- W2034292291 cites W1992458011 @default.
- W2034292291 cites W1993092568 @default.
- W2034292291 cites W1994624677 @default.
- W2034292291 cites W1996181010 @default.
- W2034292291 cites W1997994315 @default.
- W2034292291 cites W2002144609 @default.
- W2034292291 cites W2010312452 @default.
- W2034292291 cites W2015166141 @default.
- W2034292291 cites W2018072924 @default.
- W2034292291 cites W2021039545 @default.
- W2034292291 cites W2023958477 @default.
- W2034292291 cites W2024141345 @default.
- W2034292291 cites W2025990259 @default.
- W2034292291 cites W2026235582 @default.
- W2034292291 cites W2026677211 @default.
- W2034292291 cites W2036443578 @default.
- W2034292291 cites W2043730241 @default.
- W2034292291 cites W2048408746 @default.
- W2034292291 cites W2048490541 @default.
- W2034292291 cites W2048761930 @default.
- W2034292291 cites W2054167314 @default.
- W2034292291 cites W2055298388 @default.
- W2034292291 cites W2058329363 @default.
- W2034292291 cites W2061506782 @default.
- W2034292291 cites W2063820283 @default.
- W2034292291 cites W2065212618 @default.
- W2034292291 cites W2072583445 @default.
- W2034292291 cites W2080243196 @default.
- W2034292291 cites W2081094882 @default.
- W2034292291 cites W2089486737 @default.
- W2034292291 cites W2093940483 @default.
- W2034292291 cites W2094635269 @default.
- W2034292291 cites W2095160814 @default.
- W2034292291 cites W2098334071 @default.
- W2034292291 cites W2107876968 @default.
- W2034292291 cites W2119450556 @default.
- W2034292291 cites W2133865602 @default.
- W2034292291 cites W2137073862 @default.
- W2034292291 cites W2137983525 @default.
- W2034292291 cites W2157321441 @default.
- W2034292291 cites W2167830781 @default.
- W2034292291 cites W2168756522 @default.
- W2034292291 cites W632839044 @default.
- W2034292291 doi "https://doi.org/10.1063/1.4900996" @default.
- W2034292291 hasPublicationYear "2014" @default.
- W2034292291 type Work @default.
- W2034292291 sameAs 2034292291 @default.
- W2034292291 citedByCount "93" @default.
- W2034292291 countsByYear W20342922912015 @default.
- W2034292291 countsByYear W20342922912016 @default.
- W2034292291 countsByYear W20342922912017 @default.
- W2034292291 countsByYear W20342922912018 @default.
- W2034292291 countsByYear W20342922912019 @default.
- W2034292291 countsByYear W20342922912020 @default.
- W2034292291 countsByYear W20342922912021 @default.
- W2034292291 countsByYear W20342922912022 @default.
- W2034292291 countsByYear W20342922912023 @default.
- W2034292291 crossrefType "journal-article" @default.
- W2034292291 hasAuthorship W2034292291A5036597067 @default.
- W2034292291 hasAuthorship W2034292291A5037429792 @default.
- W2034292291 hasAuthorship W2034292291A5045742638 @default.
- W2034292291 hasAuthorship W2034292291A5069441090 @default.
- W2034292291 hasAuthorship W2034292291A5082470249 @default.
- W2034292291 hasAuthorship W2034292291A5090054917 @default.
- W2034292291 hasBestOaLocation W20342922911 @default.
- W2034292291 hasConcept C100460472 @default.
- W2034292291 hasConcept C107187091 @default.
- W2034292291 hasConcept C121332964 @default.
- W2034292291 hasConcept C130472188 @default.
- W2034292291 hasConcept C136525101 @default.
- W2034292291 hasConcept C142724271 @default.
- W2034292291 hasConcept C171250308 @default.
- W2034292291 hasConcept C186187911 @default.
- W2034292291 hasConcept C192562407 @default.
- W2034292291 hasConcept C204787440 @default.
- W2034292291 hasConcept C2778166601 @default.