Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034293790> ?p ?o ?g. }
Showing items 1 to 79 of
79
with 100 items per page.
- W2034293790 endingPage "1503" @default.
- W2034293790 startingPage "1503" @default.
- W2034293790 abstract "Electron energy distribution functions in a low-pressure rf discharge (<1 mTorr) were measured with an electrostatic energy analyzer facing the powered electrode and the bulk plasma. Electrons with high energy were observed in the former case, whereas the distribution of electrons was almost Maxwellian in the latter case." @default.
- W2034293790 created "2016-06-24" @default.
- W2034293790 creator A5042495241 @default.
- W2034293790 creator A5044129898 @default.
- W2034293790 creator A5050333593 @default.
- W2034293790 creator A5057075069 @default.
- W2034293790 date "1992-05-01" @default.
- W2034293790 modified "2023-10-16" @default.
- W2034293790 title "Measurement of Electron Energy Distribution Function in a Low-Pressure rf Discharge Plasma" @default.
- W2034293790 cites W1999193328 @default.
- W2034293790 cites W2011351253 @default.
- W2034293790 cites W2024730944 @default.
- W2034293790 cites W2029735922 @default.
- W2034293790 cites W2029819074 @default.
- W2034293790 cites W2072154887 @default.
- W2034293790 cites W2158196597 @default.
- W2034293790 doi "https://doi.org/10.1143/jjap.31.1503" @default.
- W2034293790 hasPublicationYear "1992" @default.
- W2034293790 type Work @default.
- W2034293790 sameAs 2034293790 @default.
- W2034293790 citedByCount "5" @default.
- W2034293790 crossrefType "journal-article" @default.
- W2034293790 hasAuthorship W2034293790A5042495241 @default.
- W2034293790 hasAuthorship W2034293790A5044129898 @default.
- W2034293790 hasAuthorship W2034293790A5050333593 @default.
- W2034293790 hasAuthorship W2034293790A5057075069 @default.
- W2034293790 hasConcept C120665830 @default.
- W2034293790 hasConcept C121332964 @default.
- W2034293790 hasConcept C125989502 @default.
- W2034293790 hasConcept C131097465 @default.
- W2034293790 hasConcept C147120987 @default.
- W2034293790 hasConcept C158007255 @default.
- W2034293790 hasConcept C184779094 @default.
- W2034293790 hasConcept C185544564 @default.
- W2034293790 hasConcept C185592680 @default.
- W2034293790 hasConcept C186603090 @default.
- W2034293790 hasConcept C192562407 @default.
- W2034293790 hasConcept C2986743833 @default.
- W2034293790 hasConcept C30646810 @default.
- W2034293790 hasConcept C62520636 @default.
- W2034293790 hasConcept C82706917 @default.
- W2034293790 hasConcept C97355855 @default.
- W2034293790 hasConceptScore W2034293790C120665830 @default.
- W2034293790 hasConceptScore W2034293790C121332964 @default.
- W2034293790 hasConceptScore W2034293790C125989502 @default.
- W2034293790 hasConceptScore W2034293790C131097465 @default.
- W2034293790 hasConceptScore W2034293790C147120987 @default.
- W2034293790 hasConceptScore W2034293790C158007255 @default.
- W2034293790 hasConceptScore W2034293790C184779094 @default.
- W2034293790 hasConceptScore W2034293790C185544564 @default.
- W2034293790 hasConceptScore W2034293790C185592680 @default.
- W2034293790 hasConceptScore W2034293790C186603090 @default.
- W2034293790 hasConceptScore W2034293790C192562407 @default.
- W2034293790 hasConceptScore W2034293790C2986743833 @default.
- W2034293790 hasConceptScore W2034293790C30646810 @default.
- W2034293790 hasConceptScore W2034293790C62520636 @default.
- W2034293790 hasConceptScore W2034293790C82706917 @default.
- W2034293790 hasConceptScore W2034293790C97355855 @default.
- W2034293790 hasIssue "5R" @default.
- W2034293790 hasLocation W20342937901 @default.
- W2034293790 hasOpenAccess W2034293790 @default.
- W2034293790 hasPrimaryLocation W20342937901 @default.
- W2034293790 hasRelatedWork W1978017542 @default.
- W2034293790 hasRelatedWork W2023662332 @default.
- W2034293790 hasRelatedWork W2034293790 @default.
- W2034293790 hasRelatedWork W2094591784 @default.
- W2034293790 hasRelatedWork W2155552404 @default.
- W2034293790 hasRelatedWork W2163047284 @default.
- W2034293790 hasRelatedWork W2334620464 @default.
- W2034293790 hasRelatedWork W2387707365 @default.
- W2034293790 hasRelatedWork W3104083206 @default.
- W2034293790 hasRelatedWork W2033331938 @default.
- W2034293790 hasVolume "31" @default.
- W2034293790 isParatext "false" @default.
- W2034293790 isRetracted "false" @default.
- W2034293790 magId "2034293790" @default.
- W2034293790 workType "article" @default.