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• W2034319063 abstract "Abstract Electromigration lifetime, filling of narrow contact areas (step coverage), electrical resistivity, and composition depth profiles of aluminum thin films, typical for muelectronic device metallizations have been investigated by utilizing specimens laid down by various methods, which include the “ionized cluster beam” (ICB) technique, “self-ion enhanced physical vapor deposition” (SIEPVD) and sputtering. The increased electromigration resistance observed for ICB aluminum films is interpreted to be partially due to the presence of Al 2 O 3 in the aluminum grain boundary network and partially due to a modified film morphology. SIEPVD enables one to lay down aluminum films near room temperature into narrow contact areas which have lateral dimensions of 0.5 μm or possibly less and an aspect ratio larger than 2.5." @default.
• W2034319063 created "2016-06-24" @default.
• W2034319063 creator A5037487745 @default.
• W2034319063 creator A5044085909 @default.
• W2034319063 creator A5060371315 @default.
• W2034319063 date "1991-07-01" @default.
• W2034319063 modified "2023-09-27" @default.
• W2034319063 title "Electromigration and contact filling of aluminum films deposited by ion-enhanced processes" @default.
• W2034319063 cites W2006190036 @default.
• W2034319063 cites W2027082441 @default.
• W2034319063 cites W2037909859 @default.
• W2034319063 cites W2063321049 @default.
• W2034319063 cites W2067109340 @default.
• W2034319063 cites W2080725623 @default.
• W2034319063 cites W2087791948 @default.
• W2034319063 cites W2087849735 @default.
• W2034319063 cites W2087935474 @default.
• W2034319063 cites W2110666943 @default.
• W2034319063 cites W2118595677 @default.
• W2034319063 cites W2180898129 @default.
• W2034319063 cites W2736926657 @default.
• W2034319063 doi "https://doi.org/10.1016/0168-583x(91)95227-5" @default.
• W2034319063 hasPublicationYear "1991" @default.
• W2034319063 type Work @default.
• W2034319063 sameAs 2034319063 @default.
• W2034319063 citedByCount "0" @default.
• W2034319063 crossrefType "journal-article" @default.
• W2034319063 hasAuthorship W2034319063A5037487745 @default.
• W2034319063 hasAuthorship W2034319063A5044085909 @default.
• W2034319063 hasAuthorship W2034319063A5060371315 @default.
• W2034319063 hasConcept C119599485 @default.
• W2034319063 hasConcept C123671423 @default.
• W2034319063 hasConcept C127413603 @default.
• W2034319063 hasConcept C132235601 @default.
• W2034319063 hasConcept C138055206 @default.
• W2034319063 hasConcept C145148216 @default.
• W2034319063 hasConcept C151730666 @default.
• W2034319063 hasConcept C159985019 @default.
• W2034319063 hasConcept C161866238 @default.
• W2034319063 hasConcept C171250308 @default.
• W2034319063 hasConcept C178790620 @default.
• W2034319063 hasConcept C185592680 @default.
• W2034319063 hasConcept C19067145 @default.
• W2034319063 hasConcept C192562407 @default.
• W2034319063 hasConcept C22423302 @default.
• W2034319063 hasConcept C2779227376 @default.
• W2034319063 hasConcept C2816523 @default.
• W2034319063 hasConcept C50774322 @default.
• W2034319063 hasConcept C513153333 @default.
• W2034319063 hasConcept C57410435 @default.
• W2034319063 hasConcept C64297162 @default.
• W2034319063 hasConcept C69990965 @default.
• W2034319063 hasConcept C86803240 @default.
• W2034319063 hasConceptScore W2034319063C119599485 @default.
• W2034319063 hasConceptScore W2034319063C123671423 @default.
• W2034319063 hasConceptScore W2034319063C127413603 @default.
• W2034319063 hasConceptScore W2034319063C132235601 @default.
• W2034319063 hasConceptScore W2034319063C138055206 @default.
• W2034319063 hasConceptScore W2034319063C145148216 @default.
• W2034319063 hasConceptScore W2034319063C151730666 @default.
• W2034319063 hasConceptScore W2034319063C159985019 @default.
• W2034319063 hasConceptScore W2034319063C161866238 @default.
• W2034319063 hasConceptScore W2034319063C171250308 @default.
• W2034319063 hasConceptScore W2034319063C178790620 @default.
• W2034319063 hasConceptScore W2034319063C185592680 @default.
• W2034319063 hasConceptScore W2034319063C19067145 @default.
• W2034319063 hasConceptScore W2034319063C192562407 @default.
• W2034319063 hasConceptScore W2034319063C22423302 @default.
• W2034319063 hasConceptScore W2034319063C2779227376 @default.
• W2034319063 hasConceptScore W2034319063C2816523 @default.
• W2034319063 hasConceptScore W2034319063C50774322 @default.
• W2034319063 hasConceptScore W2034319063C513153333 @default.
• W2034319063 hasConceptScore W2034319063C57410435 @default.
• W2034319063 hasConceptScore W2034319063C64297162 @default.
• W2034319063 hasConceptScore W2034319063C69990965 @default.
• W2034319063 hasConceptScore W2034319063C86803240 @default.
• W2034319063 hasLocation W20343190631 @default.
• W2034319063 hasOpenAccess W2034319063 @default.
• W2034319063 hasPrimaryLocation W20343190631 @default.
• W2034319063 hasRelatedWork W1528344390 @default.
• W2034319063 hasRelatedWork W1972069153 @default.
• W2034319063 hasRelatedWork W1973909640 @default.
• W2034319063 hasRelatedWork W1975756476 @default.
• W2034319063 hasRelatedWork W1976566731 @default.
• W2034319063 hasRelatedWork W1983004440 @default.
• W2034319063 hasRelatedWork W1989715843 @default.
• W2034319063 hasRelatedWork W1996327192 @default.
• W2034319063 hasRelatedWork W2008011543 @default.
• W2034319063 hasRelatedWork W2011137954 @default.
• W2034319063 hasRelatedWork W2028606996 @default.
• W2034319063 hasRelatedWork W2031678413 @default.
• W2034319063 hasRelatedWork W2037831139 @default.
• W2034319063 hasRelatedWork W2050334419 @default.
• W2034319063 hasRelatedWork W2154693347 @default.
• W2034319063 hasRelatedWork W2157861600 @default.
• W2034319063 hasRelatedWork W2324303817 @default.
• W2034319063 hasRelatedWork W2324953166 @default.
• W2034319063 hasRelatedWork W2335724969 @default.
• W2034319063 hasRelatedWork W785110896 @default.
• W2034319063 isParatext "false" @default.

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