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- W2034336525 abstract "The National Institute of Standards and Technology (NIST) is currently developing a photomask linewidth standard (SRM 2059) with a lower expected uncertainty of calibration than the previous NIST standards (SRMs 473, 475, 476). In calibrating these standards, optical simulation modeling has been used to predict the microscope image intensity profiles, which are then compared to the experimental profiles to determine the certified linewidths. Consequently, the total uncertainty in the linewidth calibration is a result of uncertainty components from the optical simulation modeling and uncertainty due to experimental errors or approximations (e.g., tool imaging errors and material characterization errors). Errors of approximation in the simulation model and uncertainty in the parameters used in the model can contribute a large component to the total linewidth uncertainty. We have studied the effects of model parameter variation on measurement uncertainty using several different optical simulation programs that utilize different mathematical techniques. We have also evaluated the effects of chrome edge runout and varying indices of refraction on the linewidth images. There are several experimental parameters that are not ordinarily included in the modeling simulation. For example, the modeling programs assume a uniform illuminating field (e.g., Koehler illumination), ideal optics and perfect optical alignment. In practice, determining whether Koehler illumination has been achieved is difficult, and the optical components and their alignments are never ideal. We will present some techniques for evaluating Koehler illumination and methods to compensate for scattered (flare) light. Any such experimental elements, that are assumed accurate in the modeling, may actually present significant components to the uncertainty and need to be quantitatively estimated. The present state of metrology does not permit the absolute calibration of linewidth standards to the level of uncertainty called for in the semiconductor roadmap. However, there are applications for a linewidth standard and calibration strategies which do not require a NIST certified calibration (e.g., determining measurement precision). In this paper we present various critical elements of a systematic and thorough evaluation of the key components of linewidth uncertainty as well as our methods for evaluating and reducing modeling and experimental uncertainties." @default.
- W2034336525 created "2016-06-24" @default.
- W2034336525 creator A5011608936 @default.
- W2034336525 creator A5070749381 @default.
- W2034336525 creator A5082106076 @default.
- W2034336525 date "2004-05-24" @default.
- W2034336525 modified "2023-09-23" @default.
- W2034336525 title "Improving the uncertainty of photomask linewidth measurements" @default.
- W2034336525 cites W1987284222 @default.
- W2034336525 cites W2064119972 @default.
- W2034336525 cites W2067161173 @default.
- W2034336525 cites W2146804680 @default.
- W2034336525 cites W2727283685 @default.
- W2034336525 cites W1999186592 @default.
- W2034336525 doi "https://doi.org/10.1117/12.539142" @default.
- W2034336525 hasPublicationYear "2004" @default.
- W2034336525 type Work @default.
- W2034336525 sameAs 2034336525 @default.
- W2034336525 citedByCount "1" @default.
- W2034336525 crossrefType "proceedings-article" @default.
- W2034336525 hasAuthorship W2034336525A5011608936 @default.
- W2034336525 hasAuthorship W2034336525A5070749381 @default.
- W2034336525 hasAuthorship W2034336525A5082106076 @default.
- W2034336525 hasConcept C105795698 @default.
- W2034336525 hasConcept C111219384 @default.
- W2034336525 hasConcept C11413529 @default.
- W2034336525 hasConcept C120665830 @default.
- W2034336525 hasConcept C121332964 @default.
- W2034336525 hasConcept C137209882 @default.
- W2034336525 hasConcept C142181693 @default.
- W2034336525 hasConcept C14737013 @default.
- W2034336525 hasConcept C165838908 @default.
- W2034336525 hasConcept C171250308 @default.
- W2034336525 hasConcept C177803969 @default.
- W2034336525 hasConcept C192562407 @default.
- W2034336525 hasConcept C195766429 @default.
- W2034336525 hasConcept C204321447 @default.
- W2034336525 hasConcept C2779227376 @default.
- W2034336525 hasConcept C33923547 @default.
- W2034336525 hasConcept C41008148 @default.
- W2034336525 hasConcept C44154836 @default.
- W2034336525 hasConcept C520434653 @default.
- W2034336525 hasConcept C53524968 @default.
- W2034336525 hasConceptScore W2034336525C105795698 @default.
- W2034336525 hasConceptScore W2034336525C111219384 @default.
- W2034336525 hasConceptScore W2034336525C11413529 @default.
- W2034336525 hasConceptScore W2034336525C120665830 @default.
- W2034336525 hasConceptScore W2034336525C121332964 @default.
- W2034336525 hasConceptScore W2034336525C137209882 @default.
- W2034336525 hasConceptScore W2034336525C142181693 @default.
- W2034336525 hasConceptScore W2034336525C14737013 @default.
- W2034336525 hasConceptScore W2034336525C165838908 @default.
- W2034336525 hasConceptScore W2034336525C171250308 @default.
- W2034336525 hasConceptScore W2034336525C177803969 @default.
- W2034336525 hasConceptScore W2034336525C192562407 @default.
- W2034336525 hasConceptScore W2034336525C195766429 @default.
- W2034336525 hasConceptScore W2034336525C204321447 @default.
- W2034336525 hasConceptScore W2034336525C2779227376 @default.
- W2034336525 hasConceptScore W2034336525C33923547 @default.
- W2034336525 hasConceptScore W2034336525C41008148 @default.
- W2034336525 hasConceptScore W2034336525C44154836 @default.
- W2034336525 hasConceptScore W2034336525C520434653 @default.
- W2034336525 hasConceptScore W2034336525C53524968 @default.
- W2034336525 hasLocation W20343365251 @default.
- W2034336525 hasOpenAccess W2034336525 @default.
- W2034336525 hasPrimaryLocation W20343365251 @default.
- W2034336525 hasRelatedWork W1980490761 @default.
- W2034336525 hasRelatedWork W2004771639 @default.
- W2034336525 hasRelatedWork W2046454463 @default.
- W2034336525 hasRelatedWork W2062432918 @default.
- W2034336525 hasRelatedWork W2068806422 @default.
- W2034336525 hasRelatedWork W2080652059 @default.
- W2034336525 hasRelatedWork W2081020148 @default.
- W2034336525 hasRelatedWork W2156588976 @default.
- W2034336525 hasRelatedWork W2748952813 @default.
- W2034336525 hasRelatedWork W2899084033 @default.
- W2034336525 isParatext "false" @default.
- W2034336525 isRetracted "false" @default.
- W2034336525 magId "2034336525" @default.
- W2034336525 workType "article" @default.