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- W2034341289 endingPage "23" @default.
- W2034341289 startingPage "17" @default.
- W2034341289 abstract "TiW films were deposited by d.c. magnetron sputtering and r.f. diode sputtering, with r.f. substrate bias in both cases. The r.f.-induced d.c. self bias potential on the substrate carrier was varied from zero to −300 V. The resistivity of the TiW film could be decreased by a factor of two by altering the substrate bias. The r.f.-sputtered films has higher resistivities than the d.c.-sputtered films. Auger analysis showed large decreases in titanium content as the bias voltage was increased. The oxygen content of the r.f.-sputtered films also decreased with increasing bias, but in the d.c.-sputtered films the oxygen content showed no correlation with bias. Calculated values of the titanium concentration in the films with no bias were lower than in the target by a factor of two, indicating a systematic error in the titanium content calculated from the sensitivity factors used. This is thought to be caused by preferential titanium sputtering during the Auger electron spectroscopy film profiling. The resistivity of the TiW films showed a strong linear correlation with titanium content in the d.c.-sputtered films. The situation was less clear with the r.f.-sputtered films, which were more contaminated with oxygen." @default.
- W2034341289 created "2016-06-24" @default.
- W2034341289 creator A5068658620 @default.
- W2034341289 date "1979-11-01" @default.
- W2034341289 modified "2023-09-25" @default.
- W2034341289 title "Resistivity of bias-sputtered TiW films" @default.
- W2034341289 cites W1979450407 @default.
- W2034341289 cites W2003118210 @default.
- W2034341289 cites W2013476338 @default.
- W2034341289 cites W2017425396 @default.
- W2034341289 cites W2018749552 @default.
- W2034341289 cites W2025309083 @default.
- W2034341289 cites W2060589486 @default.
- W2034341289 doi "https://doi.org/10.1016/0040-6090(79)90536-4" @default.
- W2034341289 hasPublicationYear "1979" @default.
- W2034341289 type Work @default.
- W2034341289 sameAs 2034341289 @default.
- W2034341289 citedByCount "20" @default.
- W2034341289 countsByYear W20343412892013 @default.
- W2034341289 countsByYear W20343412892014 @default.
- W2034341289 countsByYear W20343412892019 @default.
- W2034341289 countsByYear W20343412892020 @default.
- W2034341289 countsByYear W20343412892021 @default.
- W2034341289 crossrefType "journal-article" @default.
- W2034341289 hasAuthorship W2034341289A5068658620 @default.
- W2034341289 hasConcept C111368507 @default.
- W2034341289 hasConcept C113196181 @default.
- W2034341289 hasConcept C119599485 @default.
- W2034341289 hasConcept C121332964 @default.
- W2034341289 hasConcept C127313418 @default.
- W2034341289 hasConcept C127413603 @default.
- W2034341289 hasConcept C165801399 @default.
- W2034341289 hasConcept C171250308 @default.
- W2034341289 hasConcept C178790620 @default.
- W2034341289 hasConcept C185544564 @default.
- W2034341289 hasConcept C185592680 @default.
- W2034341289 hasConcept C19067145 @default.
- W2034341289 hasConcept C191897082 @default.
- W2034341289 hasConcept C192562407 @default.
- W2034341289 hasConcept C199289684 @default.
- W2034341289 hasConcept C20254490 @default.
- W2034341289 hasConcept C22423302 @default.
- W2034341289 hasConcept C25442681 @default.
- W2034341289 hasConcept C2777289219 @default.
- W2034341289 hasConcept C43617362 @default.
- W2034341289 hasConcept C506065880 @default.
- W2034341289 hasConcept C540031477 @default.
- W2034341289 hasConcept C61427134 @default.
- W2034341289 hasConcept C69990965 @default.
- W2034341289 hasConceptScore W2034341289C111368507 @default.
- W2034341289 hasConceptScore W2034341289C113196181 @default.
- W2034341289 hasConceptScore W2034341289C119599485 @default.
- W2034341289 hasConceptScore W2034341289C121332964 @default.
- W2034341289 hasConceptScore W2034341289C127313418 @default.
- W2034341289 hasConceptScore W2034341289C127413603 @default.
- W2034341289 hasConceptScore W2034341289C165801399 @default.
- W2034341289 hasConceptScore W2034341289C171250308 @default.
- W2034341289 hasConceptScore W2034341289C178790620 @default.
- W2034341289 hasConceptScore W2034341289C185544564 @default.
- W2034341289 hasConceptScore W2034341289C185592680 @default.
- W2034341289 hasConceptScore W2034341289C19067145 @default.
- W2034341289 hasConceptScore W2034341289C191897082 @default.
- W2034341289 hasConceptScore W2034341289C192562407 @default.
- W2034341289 hasConceptScore W2034341289C199289684 @default.
- W2034341289 hasConceptScore W2034341289C20254490 @default.
- W2034341289 hasConceptScore W2034341289C22423302 @default.
- W2034341289 hasConceptScore W2034341289C25442681 @default.
- W2034341289 hasConceptScore W2034341289C2777289219 @default.
- W2034341289 hasConceptScore W2034341289C43617362 @default.
- W2034341289 hasConceptScore W2034341289C506065880 @default.
- W2034341289 hasConceptScore W2034341289C540031477 @default.
- W2034341289 hasConceptScore W2034341289C61427134 @default.
- W2034341289 hasConceptScore W2034341289C69990965 @default.
- W2034341289 hasIssue "1" @default.
- W2034341289 hasLocation W20343412891 @default.
- W2034341289 hasOpenAccess W2034341289 @default.
- W2034341289 hasPrimaryLocation W20343412891 @default.
- W2034341289 hasRelatedWork W1995810423 @default.
- W2034341289 hasRelatedWork W2034341289 @default.
- W2034341289 hasRelatedWork W2062459093 @default.
- W2034341289 hasRelatedWork W2081874730 @default.
- W2034341289 hasRelatedWork W2316948141 @default.
- W2034341289 hasRelatedWork W2373579184 @default.
- W2034341289 hasRelatedWork W2388498853 @default.
- W2034341289 hasRelatedWork W2526521535 @default.
- W2034341289 hasRelatedWork W2947002969 @default.
- W2034341289 hasRelatedWork W2557029576 @default.
- W2034341289 hasVolume "64" @default.
- W2034341289 isParatext "false" @default.
- W2034341289 isRetracted "false" @default.
- W2034341289 magId "2034341289" @default.
- W2034341289 workType "article" @default.