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- W2034343142 abstract "A pupil filter optimization algorithm is presented. The algorithm was tested for low-aperture stepper. The experimental data for resolution and depth of focus enhancement are described.© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2034343142 date "2004-05-28" @default.
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- W2034343142 title "<title>Automatical optimization of pupil filters for high-resolution photolithography</title>" @default.
- W2034343142 doi "https://doi.org/10.1117/12.556989" @default.
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