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- W2034353986 endingPage "033105" @default.
- W2034353986 startingPage "033105" @default.
- W2034353986 abstract "Characterization of measurement accuracy of the phase-shifting point diffraction interferometer (PS/PDI) is usually performed by two-pinhole null test. In this procedure, the geometrical coma and detector tilt astigmatism systematic errors are almost one or two magnitude higher than the desired accuracy of PS/PDI. These errors must be accurately removed from the null test result to achieve high accuracy. Published calibration methods, which can remove the geometrical coma error successfully, have some limitations in calibrating the astigmatism error. In this paper, we propose a method to simultaneously calibrate the geometrical coma and detector tilt astigmatism errors in PS/PDI null test. Based on the measurement results obtained from two pinhole pairs in orthogonal directions, the method utilizes the orthogonal and rotational symmetry properties of Zernike polynomials over unit circle to calculate the systematic errors introduced in null test of PS/PDI. The experiment using PS/PDI operated at visible light is performed to verify the method. The results show that the method is effective in isolating the systematic errors of PS/PDI and the measurement accuracy of the calibrated PS/PDI is 0.0088λ rms (λ = 632.8 nm)." @default.
- W2034353986 created "2016-06-24" @default.
- W2034353986 creator A5020286464 @default.
- W2034353986 creator A5032005332 @default.
- W2034353986 creator A5084762460 @default.
- W2034353986 date "2011-03-01" @default.
- W2034353986 modified "2023-09-23" @default.
- W2034353986 title "Calibration method to characterize the accuracy of phase-shifting point diffraction interferometer" @default.
- W2034353986 cites W1984184999 @default.
- W2034353986 cites W1988627834 @default.
- W2034353986 cites W2010861904 @default.
- W2034353986 cites W2018138518 @default.
- W2034353986 cites W2020130711 @default.
- W2034353986 cites W2073913901 @default.
- W2034353986 cites W2078243939 @default.
- W2034353986 cites W2079246402 @default.
- W2034353986 cites W2081242336 @default.
- W2034353986 cites W2084144319 @default.
- W2034353986 cites W2094604249 @default.
- W2034353986 cites W2094922848 @default.
- W2034353986 cites W4253867788 @default.
- W2034353986 doi "https://doi.org/10.1063/1.3560072" @default.
- W2034353986 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/21456716" @default.
- W2034353986 hasPublicationYear "2011" @default.
- W2034353986 type Work @default.
- W2034353986 sameAs 2034353986 @default.
- W2034353986 citedByCount "2" @default.
- W2034353986 countsByYear W20343539862014 @default.
- W2034353986 countsByYear W20343539862015 @default.
- W2034353986 crossrefType "journal-article" @default.
- W2034353986 hasAuthorship W2034353986A5020286464 @default.
- W2034353986 hasAuthorship W2034353986A5032005332 @default.
- W2034353986 hasAuthorship W2034353986A5084762460 @default.
- W2034353986 hasConcept C100136789 @default.
- W2034353986 hasConcept C105795698 @default.
- W2034353986 hasConcept C109821595 @default.
- W2034353986 hasConcept C120665830 @default.
- W2034353986 hasConcept C121332964 @default.
- W2034353986 hasConcept C165699331 @default.
- W2034353986 hasConcept C165838908 @default.
- W2034353986 hasConcept C166689943 @default.
- W2034353986 hasConcept C19619285 @default.
- W2034353986 hasConcept C202799725 @default.
- W2034353986 hasConcept C203763787 @default.
- W2034353986 hasConcept C2524010 @default.
- W2034353986 hasConcept C2776700484 @default.
- W2034353986 hasConcept C2779844322 @default.
- W2034353986 hasConcept C33923547 @default.
- W2034353986 hasConcept C41008148 @default.
- W2034353986 hasConcept C62520636 @default.
- W2034353986 hasConcept C77088390 @default.
- W2034353986 hasConcept C92423082 @default.
- W2034353986 hasConcept C94915269 @default.
- W2034353986 hasConceptScore W2034353986C100136789 @default.
- W2034353986 hasConceptScore W2034353986C105795698 @default.
- W2034353986 hasConceptScore W2034353986C109821595 @default.
- W2034353986 hasConceptScore W2034353986C120665830 @default.
- W2034353986 hasConceptScore W2034353986C121332964 @default.
- W2034353986 hasConceptScore W2034353986C165699331 @default.
- W2034353986 hasConceptScore W2034353986C165838908 @default.
- W2034353986 hasConceptScore W2034353986C166689943 @default.
- W2034353986 hasConceptScore W2034353986C19619285 @default.
- W2034353986 hasConceptScore W2034353986C202799725 @default.
- W2034353986 hasConceptScore W2034353986C203763787 @default.
- W2034353986 hasConceptScore W2034353986C2524010 @default.
- W2034353986 hasConceptScore W2034353986C2776700484 @default.
- W2034353986 hasConceptScore W2034353986C2779844322 @default.
- W2034353986 hasConceptScore W2034353986C33923547 @default.
- W2034353986 hasConceptScore W2034353986C41008148 @default.
- W2034353986 hasConceptScore W2034353986C62520636 @default.
- W2034353986 hasConceptScore W2034353986C77088390 @default.
- W2034353986 hasConceptScore W2034353986C92423082 @default.
- W2034353986 hasConceptScore W2034353986C94915269 @default.
- W2034353986 hasFunder F4320321001 @default.
- W2034353986 hasIssue "3" @default.
- W2034353986 hasLocation W20343539861 @default.
- W2034353986 hasLocation W20343539862 @default.
- W2034353986 hasOpenAccess W2034353986 @default.
- W2034353986 hasPrimaryLocation W20343539861 @default.
- W2034353986 hasRelatedWork W1973086205 @default.
- W2034353986 hasRelatedWork W1992709648 @default.
- W2034353986 hasRelatedWork W2000868621 @default.
- W2034353986 hasRelatedWork W2009677061 @default.
- W2034353986 hasRelatedWork W2011133629 @default.
- W2034353986 hasRelatedWork W2019440283 @default.
- W2034353986 hasRelatedWork W2034353986 @default.
- W2034353986 hasRelatedWork W2059161018 @default.
- W2034353986 hasRelatedWork W2331719543 @default.
- W2034353986 hasRelatedWork W2802990820 @default.
- W2034353986 hasVolume "82" @default.
- W2034353986 isParatext "false" @default.
- W2034353986 isRetracted "false" @default.
- W2034353986 magId "2034353986" @default.
- W2034353986 workType "article" @default.