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• W2034359557 abstract "Discharge-produced plasma (DPP) based EUV source is being developed at Gotenba Branch of EUVA Hiratsuka R&D Center. Among the several kinds of discharge scheme, Z-pinch is employed in our source. An all-solid-state magnetic pulse compression (MPC) generator is used to create a Z-pinch plasma. Low inductance MPC generator is capable of producing a pulsed current with over 50 kA of peak amplitude and about 100 ns of pulse duration at 7 kHz of pulse repetition frequency. In order to obtain sufficient output radiation power, tin-containing gas is being used as well as xenon. Due to the high spectral efficiency of tin, demonstrated EUV output power reached 645 W/2&#960;sr within 2% bandwidth around 13.5 nm. A novel scheme of fuel gas supply led to as good output energy stability as xenon can achieve. Using a nested grazing-incidence collector, EUV power at intermediate focus point which is defined as an interface to the exposure tool reached 42 W with 3.3 mm²sr of etendue." @default.
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• W2034359557 date "2006-03-10" @default.
• W2034359557 modified "2023-09-26" @default.
• W2034359557 title "Development of Xe- and Sn-fueled high-power Z-pinch EUV source aiming at HVM" @default.
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• W2034359557 doi "https://doi.org/10.1117/12.657272" @default.
• W2034359557 hasPublicationYear "2006" @default.
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