Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034364098> ?p ?o ?g. }
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86
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- W2034364098 endingPage "033011" @default.
- W2034364098 startingPage "033011" @default.
- W2034364098 abstract "Extreme ultraviolet lithography (EUVL)-embedded phase-shift mask (EPSM) for 16-nm half-pitch node technology and beyond generations will provide improvements in process window and low shadowing effect as compared to those of the conventional EUVL binary mask. In a previous study, we experimentally demonstrated the advantages of the EUVL EPSM for the dense lines and contacts as compared to those of the standard EUVL mask. In this study, we focused more on systematic analysis and comparison of the process windows between EUVL EPSM and conventional EUVL binary mask for various feature types. In addition, we investigated the EUVL EPSM performances as a function of phase errors in order to further define the EUVL EPSM absorber thickness uniformity requirements. Both the EUVL EPSM and binary mask were exposed at the Alpha Demo Tool at IMEC, and the wafer level data show features in the EPSM have a larger process window, lower dose-to-target value, and reduced shadowing effect as compared to those of the conventional EUVL binary mask." @default.
- W2034364098 created "2016-06-24" @default.
- W2034364098 creator A5002694870 @default.
- W2034364098 creator A5025238934 @default.
- W2034364098 creator A5036622780 @default.
- W2034364098 creator A5040887607 @default.
- W2034364098 creator A5051114010 @default.
- W2034364098 creator A5052762597 @default.
- W2034364098 date "2011-07-01" @default.
- W2034364098 modified "2023-09-22" @default.
- W2034364098 title "Extreme ultraviolet–embedded phase-shift mask" @default.
- W2034364098 cites W1978272712 @default.
- W2034364098 cites W2027868365 @default.
- W2034364098 cites W2028060351 @default.
- W2034364098 cites W2040958247 @default.
- W2034364098 cites W2043365224 @default.
- W2034364098 cites W2049325008 @default.
- W2034364098 cites W2050243074 @default.
- W2034364098 cites W2053108589 @default.
- W2034364098 cites W2082947180 @default.
- W2034364098 cites W2085628198 @default.
- W2034364098 cites W2093728534 @default.
- W2034364098 doi "https://doi.org/10.1117/1.3616060" @default.
- W2034364098 hasPublicationYear "2011" @default.
- W2034364098 type Work @default.
- W2034364098 sameAs 2034364098 @default.
- W2034364098 citedByCount "4" @default.
- W2034364098 countsByYear W20343640982012 @default.
- W2034364098 countsByYear W20343640982013 @default.
- W2034364098 countsByYear W20343640982018 @default.
- W2034364098 crossrefType "journal-article" @default.
- W2034364098 hasAuthorship W2034364098A5002694870 @default.
- W2034364098 hasAuthorship W2034364098A5025238934 @default.
- W2034364098 hasAuthorship W2034364098A5036622780 @default.
- W2034364098 hasAuthorship W2034364098A5040887607 @default.
- W2034364098 hasAuthorship W2034364098A5051114010 @default.
- W2034364098 hasAuthorship W2034364098A5052762597 @default.
- W2034364098 hasConcept C105487726 @default.
- W2034364098 hasConcept C120665830 @default.
- W2034364098 hasConcept C121332964 @default.
- W2034364098 hasConcept C146024833 @default.
- W2034364098 hasConcept C160671074 @default.
- W2034364098 hasConcept C162996421 @default.
- W2034364098 hasConcept C192562407 @default.
- W2034364098 hasConcept C204223013 @default.
- W2034364098 hasConcept C2777441419 @default.
- W2034364098 hasConcept C33923547 @default.
- W2034364098 hasConcept C48372109 @default.
- W2034364098 hasConcept C49040817 @default.
- W2034364098 hasConcept C520434653 @default.
- W2034364098 hasConcept C94375191 @default.
- W2034364098 hasConceptScore W2034364098C105487726 @default.
- W2034364098 hasConceptScore W2034364098C120665830 @default.
- W2034364098 hasConceptScore W2034364098C121332964 @default.
- W2034364098 hasConceptScore W2034364098C146024833 @default.
- W2034364098 hasConceptScore W2034364098C160671074 @default.
- W2034364098 hasConceptScore W2034364098C162996421 @default.
- W2034364098 hasConceptScore W2034364098C192562407 @default.
- W2034364098 hasConceptScore W2034364098C204223013 @default.
- W2034364098 hasConceptScore W2034364098C2777441419 @default.
- W2034364098 hasConceptScore W2034364098C33923547 @default.
- W2034364098 hasConceptScore W2034364098C48372109 @default.
- W2034364098 hasConceptScore W2034364098C49040817 @default.
- W2034364098 hasConceptScore W2034364098C520434653 @default.
- W2034364098 hasConceptScore W2034364098C94375191 @default.
- W2034364098 hasIssue "3" @default.
- W2034364098 hasLocation W20343640981 @default.
- W2034364098 hasOpenAccess W2034364098 @default.
- W2034364098 hasPrimaryLocation W20343640981 @default.
- W2034364098 hasRelatedWork W1990897501 @default.
- W2034364098 hasRelatedWork W1995361396 @default.
- W2034364098 hasRelatedWork W2016439177 @default.
- W2034364098 hasRelatedWork W2022331525 @default.
- W2034364098 hasRelatedWork W2601525746 @default.
- W2034364098 hasRelatedWork W2975285997 @default.
- W2034364098 hasRelatedWork W3122703849 @default.
- W2034364098 hasRelatedWork W4229021908 @default.
- W2034364098 hasRelatedWork W4311414506 @default.
- W2034364098 hasRelatedWork W4367307994 @default.
- W2034364098 hasVolume "10" @default.
- W2034364098 isParatext "false" @default.
- W2034364098 isRetracted "false" @default.
- W2034364098 magId "2034364098" @default.
- W2034364098 workType "article" @default.