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- W2034364838 abstract "Excimer laser ablation is used in conjunction with mask projection techniques to produce novel and complex microstructures. Special multiple-mask techniques have been developed which, together with synchronized workpiece motion and laser firing, are used for the manufacture of features such as micro-channels, ramps, contoured surfaces with channels etc. These new techniques allow planar microstructures to be combined and superimposed onto curved or multifaceted shapes, thereby enabling hitherto unobtainable structures to be produced. Details are given of the techniques used along with examples of the types of structures which have been produced." @default.
- W2034364838 created "2016-06-24" @default.
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- W2034364838 date "1999-03-10" @default.
- W2034364838 modified "2023-09-23" @default.
- W2034364838 title "Production of novel 3D microstructures using excimer laser mask projection techniques" @default.
- W2034364838 doi "https://doi.org/10.1117/12.341245" @default.
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