Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034373023> ?p ?o ?g. }
- W2034373023 endingPage "768" @default.
- W2034373023 startingPage "768" @default.
- W2034373023 abstract "We report a three-dimensional (3D) simulation model based on the kinetic transport theory for calculating the distribution of PMMA fragments after an exposure to electron impact. The conditions employed for the modeling were chosen to resemble a typical electron beam lithography exposure. The model accounts for inelastic collisions of electrons in PMMA and resulting random main-chain scissions. We have considered gratings composed of parallel lines distanced by 10–50nm and exposed to electrons with energies of 10–60keV. By the model simulations, we have generated and analyzed the detailed 3D distributions of small PMMA fragments (one to ten monomers) that are soluble at the development stage and thus are responsible for the clearance in the gratings. In terms of the spatial distributions of soluble fragments, we have formulated the criteria that define the total clearance as well as the local grating development and investigated their dependence on the grating period, electron dose, and energy." @default.
- W2034373023 created "2016-06-24" @default.
- W2034373023 creator A5027185439 @default.
- W2034373023 creator A5030349620 @default.
- W2034373023 creator A5085077462 @default.
- W2034373023 date "2006-01-01" @default.
- W2034373023 modified "2023-09-23" @default.
- W2034373023 title "Simulation of the spatial distribution and molecular weight of polymethylmethacrylate fragments in electron beam lithography exposures" @default.
- W2034373023 cites W1974207245 @default.
- W2034373023 cites W1978384600 @default.
- W2034373023 cites W1982198447 @default.
- W2034373023 cites W1983485567 @default.
- W2034373023 cites W1992671237 @default.
- W2034373023 cites W1996609563 @default.
- W2034373023 cites W2002198132 @default.
- W2034373023 cites W2003974663 @default.
- W2034373023 cites W2004009045 @default.
- W2034373023 cites W2004073360 @default.
- W2034373023 cites W2004205285 @default.
- W2034373023 cites W2012365739 @default.
- W2034373023 cites W2012706475 @default.
- W2034373023 cites W2012854644 @default.
- W2034373023 cites W2027682502 @default.
- W2034373023 cites W2029629733 @default.
- W2034373023 cites W2031795259 @default.
- W2034373023 cites W2036937934 @default.
- W2034373023 cites W2037537680 @default.
- W2034373023 cites W2044281192 @default.
- W2034373023 cites W2045471820 @default.
- W2034373023 cites W2048667697 @default.
- W2034373023 cites W2049562505 @default.
- W2034373023 cites W2052043895 @default.
- W2034373023 cites W2053572542 @default.
- W2034373023 cites W2058200553 @default.
- W2034373023 cites W2062105964 @default.
- W2034373023 cites W2062778626 @default.
- W2034373023 cites W2065689916 @default.
- W2034373023 cites W2074064789 @default.
- W2034373023 cites W2075265002 @default.
- W2034373023 cites W2078744361 @default.
- W2034373023 cites W2085630386 @default.
- W2034373023 cites W2090969872 @default.
- W2034373023 cites W2091588011 @default.
- W2034373023 cites W2110641502 @default.
- W2034373023 cites W2115785410 @default.
- W2034373023 cites W2119745800 @default.
- W2034373023 cites W1997089860 @default.
- W2034373023 doi "https://doi.org/10.1116/1.2181580" @default.
- W2034373023 hasPublicationYear "2006" @default.
- W2034373023 type Work @default.
- W2034373023 sameAs 2034373023 @default.
- W2034373023 citedByCount "44" @default.
- W2034373023 countsByYear W20343730232012 @default.
- W2034373023 countsByYear W20343730232013 @default.
- W2034373023 countsByYear W20343730232014 @default.
- W2034373023 countsByYear W20343730232015 @default.
- W2034373023 countsByYear W20343730232016 @default.
- W2034373023 countsByYear W20343730232019 @default.
- W2034373023 countsByYear W20343730232020 @default.
- W2034373023 countsByYear W20343730232021 @default.
- W2034373023 countsByYear W20343730232023 @default.
- W2034373023 crossrefType "journal-article" @default.
- W2034373023 hasAuthorship W2034373023A5027185439 @default.
- W2034373023 hasAuthorship W2034373023A5030349620 @default.
- W2034373023 hasAuthorship W2034373023A5085077462 @default.
- W2034373023 hasConcept C105795698 @default.
- W2034373023 hasConcept C120665830 @default.
- W2034373023 hasConcept C121332964 @default.
- W2034373023 hasConcept C135889238 @default.
- W2034373023 hasConcept C147120987 @default.
- W2034373023 hasConcept C171250308 @default.
- W2034373023 hasConcept C184779094 @default.
- W2034373023 hasConcept C185544564 @default.
- W2034373023 hasConcept C192562407 @default.
- W2034373023 hasConcept C200274948 @default.
- W2034373023 hasConcept C204223013 @default.
- W2034373023 hasConcept C2777016058 @default.
- W2034373023 hasConcept C2777813233 @default.
- W2034373023 hasConcept C2779227376 @default.
- W2034373023 hasConcept C33923547 @default.
- W2034373023 hasConcept C41999313 @default.
- W2034373023 hasConcept C49040817 @default.
- W2034373023 hasConcept C53524968 @default.
- W2034373023 hasConcept C62520636 @default.
- W2034373023 hasConcept C95312477 @default.
- W2034373023 hasConceptScore W2034373023C105795698 @default.
- W2034373023 hasConceptScore W2034373023C120665830 @default.
- W2034373023 hasConceptScore W2034373023C121332964 @default.
- W2034373023 hasConceptScore W2034373023C135889238 @default.
- W2034373023 hasConceptScore W2034373023C147120987 @default.
- W2034373023 hasConceptScore W2034373023C171250308 @default.
- W2034373023 hasConceptScore W2034373023C184779094 @default.
- W2034373023 hasConceptScore W2034373023C185544564 @default.
- W2034373023 hasConceptScore W2034373023C192562407 @default.
- W2034373023 hasConceptScore W2034373023C200274948 @default.
- W2034373023 hasConceptScore W2034373023C204223013 @default.
- W2034373023 hasConceptScore W2034373023C2777016058 @default.
- W2034373023 hasConceptScore W2034373023C2777813233 @default.