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- W2034374608 abstract "In a project originally aimed at X-ray proximity lithography (XRL) for semiconductor manufacturing and funded by A∗STAR (Agency for Science, Technology and Research, previously National Science and Technology Board (NSTB)) and Ministry of Education (MoE), the National University of Singapore (NUS) erected SSLS building (Figure 1a) and contracted Oxford Instruments (UK) to install their Helios 2 accelerator system in 2000." @default.
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- W2034374608 date "2009-07-31" @default.
- W2034374608 modified "2023-09-28" @default.
- W2034374608 title "Singapore Synchrotron Light Source" @default.
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- W2034374608 doi "https://doi.org/10.1080/08940880903113927" @default.
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