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- W2034399937 abstract "We have developed a new method for fabricating a silicon submicrometer shadow mask for nanofabrication in ultra-high vacuum. Combining KOH anisotropic wet etching, electron beam lithography, reactive ion etching and focused ion beam techniques, a pattern size of 2.5×2.5 mm 2 and opaque part about 1 μm can be obtained." @default.
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- W2034399937 date "1998-06-30" @default.
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- W2034399937 title "Submicrometer Shadow Mask Fabricated by Anisotropic Wet Etching and Focused Ion Beam Techniques for Nanofabrication in UHV" @default.
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- W2034399937 doi "https://doi.org/10.1142/s0217984998000706" @default.
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