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- W2034455584 abstract "A major speed limitation of Scanning Probe Microscopes (SPMs) is the low vertical feedback bandwidth imposed by the mechanical scanner resonances. The vertical feedback controller regulates the tip-sample interaction in application modes such as constant-current scanning tunneling microscopy and constant-force atomic force microscopy. To increase the vertical feedback bandwidth, dual-stage actuators have been proposed to increase the first resonance frequency. In this work, an ultra-fast dual-stage vertical positioner and control system are described. The first resonance frequency of the dual-stage positioner is 88 kHz which permits a one-hundred fold speed increase of a commercial AFM. The dual-stage system is simple, low-cost and can be retrofitted to almost any commercial SPM." @default.
- W2034455584 created "2016-06-24" @default.
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- W2034455584 date "2010-06-01" @default.
- W2034455584 modified "2023-10-14" @default.
- W2034455584 title "Ultra-fast dual-stage vertical positioning for high performance SPMs" @default.
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- W2034455584 doi "https://doi.org/10.1109/acc.2010.5530950" @default.
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