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• W2034470419 abstract "Abstract P-type hydrogenated nanocrystalline silicon (nc-Si:H) thin films are prepared on glass substrate by an inductively coupled plasma chemical vapor deposition system using multiple internal low inductance antenna units. The deposition rate as well as the microstructural and electrical properties of the nc-Si:H films are investigated systematically as functions of hydrogen dilution, discharge power and working distance. The effects of various process parameters are identified and rationalized. The applicability of this type of high density plasma to manufacture nc-Si:H films is critically assessed." @default.
• W2034470419 created "2016-06-24" @default.
• W2034470419 creator A5010145594 @default.
• W2034470419 creator A5032639416 @default.
• W2034470419 creator A5048854465 @default.
• W2034470419 creator A5091243733 @default.
• W2034470419 date "2015-10-01" @default.
• W2034470419 modified "2023-09-27" @default.
• W2034470419 title "Nanocrystalline Si:H films made by inductively coupled plasma using internal low inductance antenna" @default.
• W2034470419 cites W1669196377 @default.
• W2034470419 cites W1977288164 @default.
• W2034470419 cites W1988803589 @default.
• W2034470419 cites W2004010097 @default.
• W2034470419 cites W2009246673 @default.
• W2034470419 cites W2009874404 @default.
• W2034470419 cites W2018713371 @default.
• W2034470419 cites W2023120955 @default.
• W2034470419 cites W2028054830 @default.
• W2034470419 cites W2035830466 @default.
• W2034470419 cites W2043378350 @default.
• W2034470419 cites W2053813512 @default.
• W2034470419 cites W2068983742 @default.
• W2034470419 cites W2079302424 @default.
• W2034470419 cites W2080240036 @default.
• W2034470419 cites W2092201725 @default.
• W2034470419 cites W2093552954 @default.
• W2034470419 cites W2258969032 @default.
• W2034470419 doi "https://doi.org/10.1016/j.mssp.2014.11.019" @default.
• W2034470419 hasPublicationYear "2015" @default.
• W2034470419 type Work @default.
• W2034470419 sameAs 2034470419 @default.
• W2034470419 citedByCount "0" @default.
• W2034470419 crossrefType "journal-article" @default.
• W2034470419 hasAuthorship W2034470419A5010145594 @default.
• W2034470419 hasAuthorship W2034470419A5032639416 @default.
• W2034470419 hasAuthorship W2034470419A5048854465 @default.
• W2034470419 hasAuthorship W2034470419A5091243733 @default.
• W2034470419 hasConcept C111368507 @default.
• W2034470419 hasConcept C113196181 @default.
• W2034470419 hasConcept C121332964 @default.
• W2034470419 hasConcept C127313418 @default.
• W2034470419 hasConcept C140676511 @default.
• W2034470419 hasConcept C171250308 @default.
• W2034470419 hasConcept C185592680 @default.
• W2034470419 hasConcept C19067145 @default.
• W2034470419 hasConcept C192562407 @default.
• W2034470419 hasConcept C2776390347 @default.
• W2034470419 hasConcept C2777289219 @default.
• W2034470419 hasConcept C2779667780 @default.
• W2034470419 hasConcept C38347018 @default.
• W2034470419 hasConcept C43617362 @default.
• W2034470419 hasConcept C49040817 @default.
• W2034470419 hasConcept C544956773 @default.
• W2034470419 hasConcept C57410435 @default.
• W2034470419 hasConcept C62520636 @default.
• W2034470419 hasConcept C80086925 @default.
• W2034470419 hasConcept C82706917 @default.
• W2034470419 hasConcept C95974651 @default.
• W2034470419 hasConceptScore W2034470419C111368507 @default.
• W2034470419 hasConceptScore W2034470419C113196181 @default.
• W2034470419 hasConceptScore W2034470419C121332964 @default.
• W2034470419 hasConceptScore W2034470419C127313418 @default.
• W2034470419 hasConceptScore W2034470419C140676511 @default.
• W2034470419 hasConceptScore W2034470419C171250308 @default.
• W2034470419 hasConceptScore W2034470419C185592680 @default.
• W2034470419 hasConceptScore W2034470419C19067145 @default.
• W2034470419 hasConceptScore W2034470419C192562407 @default.
• W2034470419 hasConceptScore W2034470419C2776390347 @default.
• W2034470419 hasConceptScore W2034470419C2777289219 @default.
• W2034470419 hasConceptScore W2034470419C2779667780 @default.
• W2034470419 hasConceptScore W2034470419C38347018 @default.
• W2034470419 hasConceptScore W2034470419C43617362 @default.
• W2034470419 hasConceptScore W2034470419C49040817 @default.
• W2034470419 hasConceptScore W2034470419C544956773 @default.
• W2034470419 hasConceptScore W2034470419C57410435 @default.
• W2034470419 hasConceptScore W2034470419C62520636 @default.
• W2034470419 hasConceptScore W2034470419C80086925 @default.
• W2034470419 hasConceptScore W2034470419C82706917 @default.
• W2034470419 hasConceptScore W2034470419C95974651 @default.
• W2034470419 hasLocation W20344704191 @default.
• W2034470419 hasOpenAccess W2034470419 @default.
• W2034470419 hasPrimaryLocation W20344704191 @default.
• W2034470419 hasRelatedWork W1486466408 @default.
• W2034470419 hasRelatedWork W1498000568 @default.
• W2034470419 hasRelatedWork W1965806749 @default.
• W2034470419 hasRelatedWork W1976397635 @default.
• W2034470419 hasRelatedWork W2012302036 @default.
• W2034470419 hasRelatedWork W2012311448 @default.
• W2034470419 hasRelatedWork W2012543204 @default.
• W2034470419 hasRelatedWork W2023214366 @default.
• W2034470419 hasRelatedWork W2029081231 @default.
• W2034470419 hasRelatedWork W2073335972 @default.
• W2034470419 hasRelatedWork W2087965867 @default.
• W2034470419 hasRelatedWork W2108989299 @default.
• W2034470419 hasRelatedWork W2334296668 @default.
• W2034470419 hasRelatedWork W2479991528 @default.
• W2034470419 hasRelatedWork W2548390527 @default.
• W2034470419 hasRelatedWork W2607279712 @default.
• W2034470419 hasRelatedWork W2767079424 @default.
• W2034470419 hasRelatedWork W2810424770 @default.

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