Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034498123> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2034498123 abstract "A MEMS lateral capacitive accelerometer was designed and simulated. The accelerometer used in the study is based on gap-difference principle. It consists of 74 pairs of fingers and the proofmass suspended by two straight truss springs at both ends. Important parameters such as displacement, differential capacitance, harmonic response and sensitivity were studied and results presented. The shock resistance was also simulated to ensure the robustness of the device against external shock. The accelerometer is 40/spl mu/m thick and 0.6mm 0.7mm in size. It has a resonant frequency of 3.60 kHz at acceleration of 10g." @default.
- W2034498123 created "2016-06-24" @default.
- W2034498123 creator A5018944534 @default.
- W2034498123 creator A5078683100 @default.
- W2034498123 creator A5087109816 @default.
- W2034498123 date "2004-01-01" @default.
- W2034498123 modified "2023-09-25" @default.
- W2034498123 title "Mechanical behaviour of a 10g MEMS noncrossing differential capacitive accelerometer" @default.
- W2034498123 cites W1963760702 @default.
- W2034498123 cites W2058842564 @default.
- W2034498123 cites W2621919695 @default.
- W2034498123 doi "https://doi.org/10.1109/smelec.2004.1620904" @default.
- W2034498123 hasPublicationYear "2004" @default.
- W2034498123 type Work @default.
- W2034498123 sameAs 2034498123 @default.
- W2034498123 citedByCount "1" @default.
- W2034498123 crossrefType "proceedings-article" @default.
- W2034498123 hasAuthorship W2034498123A5018944534 @default.
- W2034498123 hasAuthorship W2034498123A5078683100 @default.
- W2034498123 hasAuthorship W2034498123A5087109816 @default.
- W2034498123 hasConcept C104317684 @default.
- W2034498123 hasConcept C107551265 @default.
- W2034498123 hasConcept C117896860 @default.
- W2034498123 hasConcept C119599485 @default.
- W2034498123 hasConcept C121332964 @default.
- W2034498123 hasConcept C126322002 @default.
- W2034498123 hasConcept C127413603 @default.
- W2034498123 hasConcept C15744967 @default.
- W2034498123 hasConcept C17525397 @default.
- W2034498123 hasConcept C185592680 @default.
- W2034498123 hasConcept C192562407 @default.
- W2034498123 hasConcept C206755178 @default.
- W2034498123 hasConcept C21200559 @default.
- W2034498123 hasConcept C24326235 @default.
- W2034498123 hasConcept C24890656 @default.
- W2034498123 hasConcept C2780330379 @default.
- W2034498123 hasConcept C2781300812 @default.
- W2034498123 hasConcept C30066665 @default.
- W2034498123 hasConcept C37977207 @default.
- W2034498123 hasConcept C49040817 @default.
- W2034498123 hasConcept C542102704 @default.
- W2034498123 hasConcept C55493867 @default.
- W2034498123 hasConcept C62520636 @default.
- W2034498123 hasConcept C63479239 @default.
- W2034498123 hasConcept C71924100 @default.
- W2034498123 hasConcept C74650414 @default.
- W2034498123 hasConcept C8590192 @default.
- W2034498123 hasConcept C89805583 @default.
- W2034498123 hasConceptScore W2034498123C104317684 @default.
- W2034498123 hasConceptScore W2034498123C107551265 @default.
- W2034498123 hasConceptScore W2034498123C117896860 @default.
- W2034498123 hasConceptScore W2034498123C119599485 @default.
- W2034498123 hasConceptScore W2034498123C121332964 @default.
- W2034498123 hasConceptScore W2034498123C126322002 @default.
- W2034498123 hasConceptScore W2034498123C127413603 @default.
- W2034498123 hasConceptScore W2034498123C15744967 @default.
- W2034498123 hasConceptScore W2034498123C17525397 @default.
- W2034498123 hasConceptScore W2034498123C185592680 @default.
- W2034498123 hasConceptScore W2034498123C192562407 @default.
- W2034498123 hasConceptScore W2034498123C206755178 @default.
- W2034498123 hasConceptScore W2034498123C21200559 @default.
- W2034498123 hasConceptScore W2034498123C24326235 @default.
- W2034498123 hasConceptScore W2034498123C24890656 @default.
- W2034498123 hasConceptScore W2034498123C2780330379 @default.
- W2034498123 hasConceptScore W2034498123C2781300812 @default.
- W2034498123 hasConceptScore W2034498123C30066665 @default.
- W2034498123 hasConceptScore W2034498123C37977207 @default.
- W2034498123 hasConceptScore W2034498123C49040817 @default.
- W2034498123 hasConceptScore W2034498123C542102704 @default.
- W2034498123 hasConceptScore W2034498123C55493867 @default.
- W2034498123 hasConceptScore W2034498123C62520636 @default.
- W2034498123 hasConceptScore W2034498123C63479239 @default.
- W2034498123 hasConceptScore W2034498123C71924100 @default.
- W2034498123 hasConceptScore W2034498123C74650414 @default.
- W2034498123 hasConceptScore W2034498123C8590192 @default.
- W2034498123 hasConceptScore W2034498123C89805583 @default.
- W2034498123 hasLocation W20344981231 @default.
- W2034498123 hasOpenAccess W2034498123 @default.
- W2034498123 hasPrimaryLocation W20344981231 @default.
- W2034498123 hasRelatedWork W1843981434 @default.
- W2034498123 hasRelatedWork W1965527644 @default.
- W2034498123 hasRelatedWork W1981205801 @default.
- W2034498123 hasRelatedWork W2310543875 @default.
- W2034498123 hasRelatedWork W2382520238 @default.
- W2034498123 hasRelatedWork W2527803799 @default.
- W2034498123 hasRelatedWork W2739119237 @default.
- W2034498123 hasRelatedWork W2795395678 @default.
- W2034498123 hasRelatedWork W2922271745 @default.
- W2034498123 hasRelatedWork W2956079039 @default.
- W2034498123 isParatext "false" @default.
- W2034498123 isRetracted "false" @default.
- W2034498123 magId "2034498123" @default.
- W2034498123 workType "article" @default.