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- W2034505925 abstract "Mechanical properties of titanium thin films of 0.5 micrometers thickness and aluminum thin films of 1.0 micrometers thickness, microfabricated by magnetron spattering, were measured by using a novel tensile machine. These thin films are extremely difficult to handle because they are very fragile, so the thin film specimens were fabricated by using semiconductor manufacturing technology in a silicon frame to protect them. The test section of these specimens was 300 micrometers in width and 1400 micrometers in gauge length. By gripping the thin film specimen with a new device using a micrometer, it could be mounted on the tensile machine easily. The stress-train diagrams of both thin films were measured continuously from elastic deformation to plastic deformation in the atmosphere at room temperature. The experimental results indicated that the titanium thin film and the aluminum thin film had a smaller breaking elongation although they had a larger tensile strength than bulk pure titanium and bulk pure aluminum, respectively." @default.
- W2034505925 created "2016-06-24" @default.
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- W2034505925 date "1996-09-13" @default.
- W2034505925 modified "2023-09-27" @default.
- W2034505925 title "Measurements of stress-strain diagrams of thin films by a developed tensile machine" @default.
- W2034505925 doi "https://doi.org/10.1117/12.250960" @default.
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