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• W2034602220 endingPage "4231" @default.
• W2034602220 startingPage "4226" @default.
• W2034602220 abstract "An isolation technology for radio frequency (rf) applications based on unoxidized porous Si (PS) is demonstrated. This study examines all the important issues pertinent to incorporating PS with Si very-large-scale integration (VLSI) technology, where PS is used as a semi-insulating material. Specifically, the issues on rf isolation performance of PS as a function of porosity [from coplanar waveguide (CPW) line measurements] and PS thickness (from on-chip inductors) and the stress generated from incorporating PS regions by anodization are discussed in detail. CPW line measurements show that the relative dielectric constant of PS films decreases from 9 to 3 with increasing porosity from 24% to 78%. PS is a very low loss material with loss tangent &lt;0.001 at 20 GHz when its porosity is above 51%. rf crosstalk through a Si substrate can be reduced to that through air by inserting a PS trench between noise generating circuit and noise sensing circuit. On-chip spiral inductors fabricated on top of PS regions of through-the-wafer thickness have Qmax of about 29 at 7 GHz and resonant frequency higher than 20 GHz. With the additional advantage of planar topography and mechanical integrity, we show that unoxidized PS is an outstanding material for rf isolation in Si VLSI." @default.
• W2034602220 created "2016-06-24" @default.
• W2034602220 creator A5003272616 @default.
• W2034602220 creator A5010924468 @default.
• W2034602220 creator A5021358673 @default.
• W2034602220 creator A5029941940 @default.
• W2034602220 creator A5031559823 @default.
• W2034602220 date "2003-03-21" @default.
• W2034602220 modified "2023-10-18" @default.
• W2034602220 title "Unoxidized porous Si as an isolation material for mixed-signal integrated circuit applications" @default.
• W2034602220 cites W1969721453 @default.
• W2034602220 cites W1987299514 @default.
• W2034602220 cites W1987421422 @default.
• W2034602220 cites W1989666031 @default.
• W2034602220 cites W2008471853 @default.
• W2034602220 cites W2020903487 @default.
• W2034602220 cites W2030068157 @default.
• W2034602220 cites W2032697712 @default.
• W2034602220 cites W2036821347 @default.
• W2034602220 cites W2044343902 @default.
• W2034602220 cites W2044846341 @default.
• W2034602220 cites W2051193635 @default.
• W2034602220 cites W2066070165 @default.
• W2034602220 cites W2109020656 @default.
• W2034602220 cites W2110318203 @default.
• W2034602220 cites W2129219019 @default.
• W2034602220 cites W2136845844 @default.
• W2034602220 cites W2154586985 @default.
• W2034602220 cites W2157598626 @default.
• W2034602220 cites W2164292894 @default.
• W2034602220 cites W2164888389 @default.
• W2034602220 cites W2167004581 @default.
• W2034602220 cites W2892048148 @default.
• W2034602220 cites W2055471094 @default.
• W2034602220 doi "https://doi.org/10.1063/1.1555700" @default.
• W2034602220 hasPublicationYear "2003" @default.
• W2034602220 type Work @default.
• W2034602220 sameAs 2034602220 @default.
• W2034602220 citedByCount "31" @default.
• W2034602220 countsByYear W20346022202012 @default.
• W2034602220 countsByYear W20346022202013 @default.
• W2034602220 countsByYear W20346022202014 @default.
• W2034602220 countsByYear W20346022202015 @default.
• W2034602220 countsByYear W20346022202016 @default.
• W2034602220 countsByYear W20346022202017 @default.
• W2034602220 countsByYear W20346022202018 @default.
• W2034602220 countsByYear W20346022202020 @default.
• W2034602220 crossrefType "journal-article" @default.
• W2034602220 hasAuthorship W2034602220A5003272616 @default.
• W2034602220 hasAuthorship W2034602220A5010924468 @default.
• W2034602220 hasAuthorship W2034602220A5021358673 @default.
• W2034602220 hasAuthorship W2034602220A5029941940 @default.
• W2034602220 hasAuthorship W2034602220A5031559823 @default.
• W2034602220 hasConcept C119599485 @default.
• W2034602220 hasConcept C120793396 @default.
• W2034602220 hasConcept C127413603 @default.
• W2034602220 hasConcept C133386390 @default.
• W2034602220 hasConcept C144534570 @default.
• W2034602220 hasConcept C159985019 @default.
• W2034602220 hasConcept C160671074 @default.
• W2034602220 hasConcept C165801399 @default.
• W2034602220 hasConcept C192562407 @default.
• W2034602220 hasConcept C3736036 @default.
• W2034602220 hasConcept C41008148 @default.
• W2034602220 hasConcept C44838205 @default.
• W2034602220 hasConcept C49040817 @default.
• W2034602220 hasConcept C530198007 @default.
• W2034602220 hasConcept C6648577 @default.
• W2034602220 hasConcept C74064498 @default.
• W2034602220 hasConcept C76155785 @default.
• W2034602220 hasConcept C97274863 @default.
• W2034602220 hasConceptScore W2034602220C119599485 @default.
• W2034602220 hasConceptScore W2034602220C120793396 @default.
• W2034602220 hasConceptScore W2034602220C127413603 @default.
• W2034602220 hasConceptScore W2034602220C133386390 @default.
• W2034602220 hasConceptScore W2034602220C144534570 @default.
• W2034602220 hasConceptScore W2034602220C159985019 @default.
• W2034602220 hasConceptScore W2034602220C160671074 @default.
• W2034602220 hasConceptScore W2034602220C165801399 @default.
• W2034602220 hasConceptScore W2034602220C192562407 @default.
• W2034602220 hasConceptScore W2034602220C3736036 @default.
• W2034602220 hasConceptScore W2034602220C41008148 @default.
• W2034602220 hasConceptScore W2034602220C44838205 @default.
• W2034602220 hasConceptScore W2034602220C49040817 @default.
• W2034602220 hasConceptScore W2034602220C530198007 @default.
• W2034602220 hasConceptScore W2034602220C6648577 @default.
• W2034602220 hasConceptScore W2034602220C74064498 @default.
• W2034602220 hasConceptScore W2034602220C76155785 @default.
• W2034602220 hasConceptScore W2034602220C97274863 @default.
• W2034602220 hasIssue "7" @default.
• W2034602220 hasLocation W20346022201 @default.
• W2034602220 hasOpenAccess W2034602220 @default.
• W2034602220 hasPrimaryLocation W20346022201 @default.
• W2034602220 hasRelatedWork W1997984059 @default.
• W2034602220 hasRelatedWork W2030823118 @default.
• W2034602220 hasRelatedWork W2053508813 @default.
• W2034602220 hasRelatedWork W2081126748 @default.
• W2034602220 hasRelatedWork W2117364386 @default.

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