Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034625093> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2034625093 abstract "Chemical mechanical polishing (CMP) is a manufacturing process that uses controlled wear to planarize dielectric and metallic layers on silicon wafers. The wafer is polished by pressing it against a rotating pad that is flooded with slurry. The slurry itself is a fluid containing abrasive particles. Material removal rate (MRR) results have shown that the distribution of suspended particles in the slurry is significantly related to the wafer surface wear distribution during CMP. In this study, a simple model has been developed and solved as a preliminary step in analyzing the migration of the particles." @default.
- W2034625093 created "2016-06-24" @default.
- W2034625093 creator A5030193449 @default.
- W2034625093 creator A5033169437 @default.
- W2034625093 creator A5091003641 @default.
- W2034625093 date "2005-01-01" @default.
- W2034625093 modified "2023-09-27" @default.
- W2034625093 title "Two-Phase Hydrodynamic Modeling of Particulate Fluids in Sliding Contacts" @default.
- W2034625093 cites W2046264839 @default.
- W2034625093 cites W2069965106 @default.
- W2034625093 cites W2075398095 @default.
- W2034625093 cites W2128088017 @default.
- W2034625093 doi "https://doi.org/10.1115/wtc2005-63778" @default.
- W2034625093 hasPublicationYear "2005" @default.
- W2034625093 type Work @default.
- W2034625093 sameAs 2034625093 @default.
- W2034625093 citedByCount "3" @default.
- W2034625093 crossrefType "proceedings-article" @default.
- W2034625093 hasAuthorship W2034625093A5030193449 @default.
- W2034625093 hasAuthorship W2034625093A5033169437 @default.
- W2034625093 hasAuthorship W2034625093A5091003641 @default.
- W2034625093 hasConcept C138113353 @default.
- W2034625093 hasConcept C159985019 @default.
- W2034625093 hasConcept C160671074 @default.
- W2034625093 hasConcept C171250308 @default.
- W2034625093 hasConcept C178790620 @default.
- W2034625093 hasConcept C180088628 @default.
- W2034625093 hasConcept C185592680 @default.
- W2034625093 hasConcept C191897082 @default.
- W2034625093 hasConcept C192562407 @default.
- W2034625093 hasConcept C24245907 @default.
- W2034625093 hasConcept C2780957350 @default.
- W2034625093 hasConcept C44280652 @default.
- W2034625093 hasConcept C93021684 @default.
- W2034625093 hasConcept C94293008 @default.
- W2034625093 hasConceptScore W2034625093C138113353 @default.
- W2034625093 hasConceptScore W2034625093C159985019 @default.
- W2034625093 hasConceptScore W2034625093C160671074 @default.
- W2034625093 hasConceptScore W2034625093C171250308 @default.
- W2034625093 hasConceptScore W2034625093C178790620 @default.
- W2034625093 hasConceptScore W2034625093C180088628 @default.
- W2034625093 hasConceptScore W2034625093C185592680 @default.
- W2034625093 hasConceptScore W2034625093C191897082 @default.
- W2034625093 hasConceptScore W2034625093C192562407 @default.
- W2034625093 hasConceptScore W2034625093C24245907 @default.
- W2034625093 hasConceptScore W2034625093C2780957350 @default.
- W2034625093 hasConceptScore W2034625093C44280652 @default.
- W2034625093 hasConceptScore W2034625093C93021684 @default.
- W2034625093 hasConceptScore W2034625093C94293008 @default.
- W2034625093 hasLocation W20346250931 @default.
- W2034625093 hasOpenAccess W2034625093 @default.
- W2034625093 hasPrimaryLocation W20346250931 @default.
- W2034625093 hasRelatedWork W2013921521 @default.
- W2034625093 hasRelatedWork W2015152413 @default.
- W2034625093 hasRelatedWork W2034625093 @default.
- W2034625093 hasRelatedWork W2072988759 @default.
- W2034625093 hasRelatedWork W2106409363 @default.
- W2034625093 hasRelatedWork W2114371462 @default.
- W2034625093 hasRelatedWork W2123982555 @default.
- W2034625093 hasRelatedWork W2132350042 @default.
- W2034625093 hasRelatedWork W2440599411 @default.
- W2034625093 hasRelatedWork W2921131276 @default.
- W2034625093 isParatext "false" @default.
- W2034625093 isRetracted "false" @default.
- W2034625093 magId "2034625093" @default.
- W2034625093 workType "article" @default.