Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034650456> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2034650456 abstract "We have investigated the impact of the Al <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> atomiclayer-deposition (ALD) temperature on Al <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> /GaSb metal-oxidesemiconductor (MOS) interface properties. We have found that the GaSb MOS interfaces are severely degraded with increasing the ALD temperature. X-ray photoelectron spectroscopy (XPS) measurements clarified that the main cause of the interface deterioration is the reduction of Sb oxides from GaSb surfaces." @default.
- W2034650456 created "2016-06-24" @default.
- W2034650456 creator A5015978973 @default.
- W2034650456 creator A5025650947 @default.
- W2034650456 creator A5031530665 @default.
- W2034650456 creator A5042410367 @default.
- W2034650456 creator A5043797357 @default.
- W2034650456 date "2013-05-01" @default.
- W2034650456 modified "2023-10-02" @default.
- W2034650456 title "Impact of Al<inf>2</inf>O<inf>3</inf> ALD temperature on Al<inf>2</inf>O<inf>3</inf>/GaSb metal-oxide-semiconductor interface properties" @default.
- W2034650456 cites W1725003191 @default.
- W2034650456 cites W1974607997 @default.
- W2034650456 cites W1976868005 @default.
- W2034650456 cites W1990207871 @default.
- W2034650456 cites W2003827499 @default.
- W2034650456 cites W2005306611 @default.
- W2034650456 cites W2009080374 @default.
- W2034650456 cites W2013558114 @default.
- W2034650456 cites W2019532295 @default.
- W2034650456 cites W2036320853 @default.
- W2034650456 cites W2039105356 @default.
- W2034650456 cites W2039261462 @default.
- W2034650456 cites W2055625120 @default.
- W2034650456 cites W2056049645 @default.
- W2034650456 cites W2091212147 @default.
- W2034650456 cites W2123977953 @default.
- W2034650456 cites W2144278405 @default.
- W2034650456 cites W2146144262 @default.
- W2034650456 cites W2156352745 @default.
- W2034650456 cites W3145101554 @default.
- W2034650456 doi "https://doi.org/10.1109/iciprm.2013.6562633" @default.
- W2034650456 hasPublicationYear "2013" @default.
- W2034650456 type Work @default.
- W2034650456 sameAs 2034650456 @default.
- W2034650456 citedByCount "1" @default.
- W2034650456 countsByYear W20346504562015 @default.
- W2034650456 crossrefType "proceedings-article" @default.
- W2034650456 hasAuthorship W2034650456A5015978973 @default.
- W2034650456 hasAuthorship W2034650456A5025650947 @default.
- W2034650456 hasAuthorship W2034650456A5031530665 @default.
- W2034650456 hasAuthorship W2034650456A5042410367 @default.
- W2034650456 hasAuthorship W2034650456A5043797357 @default.
- W2034650456 hasConcept C113843644 @default.
- W2034650456 hasConcept C121332964 @default.
- W2034650456 hasConcept C175708663 @default.
- W2034650456 hasConcept C178790620 @default.
- W2034650456 hasConcept C185592680 @default.
- W2034650456 hasConcept C191897082 @default.
- W2034650456 hasConcept C192562407 @default.
- W2034650456 hasConcept C2779851234 @default.
- W2034650456 hasConcept C32909587 @default.
- W2034650456 hasConcept C46141821 @default.
- W2034650456 hasConcept C544153396 @default.
- W2034650456 hasConcept C55352822 @default.
- W2034650456 hasConceptScore W2034650456C113843644 @default.
- W2034650456 hasConceptScore W2034650456C121332964 @default.
- W2034650456 hasConceptScore W2034650456C175708663 @default.
- W2034650456 hasConceptScore W2034650456C178790620 @default.
- W2034650456 hasConceptScore W2034650456C185592680 @default.
- W2034650456 hasConceptScore W2034650456C191897082 @default.
- W2034650456 hasConceptScore W2034650456C192562407 @default.
- W2034650456 hasConceptScore W2034650456C2779851234 @default.
- W2034650456 hasConceptScore W2034650456C32909587 @default.
- W2034650456 hasConceptScore W2034650456C46141821 @default.
- W2034650456 hasConceptScore W2034650456C544153396 @default.
- W2034650456 hasConceptScore W2034650456C55352822 @default.
- W2034650456 hasLocation W20346504561 @default.
- W2034650456 hasOpenAccess W2034650456 @default.
- W2034650456 hasPrimaryLocation W20346504561 @default.
- W2034650456 hasRelatedWork W1982678626 @default.
- W2034650456 hasRelatedWork W2006259406 @default.
- W2034650456 hasRelatedWork W2330186455 @default.
- W2034650456 hasRelatedWork W2348995727 @default.
- W2034650456 hasRelatedWork W3123525536 @default.
- W2034650456 hasRelatedWork W3212944014 @default.
- W2034650456 hasRelatedWork W4200166121 @default.
- W2034650456 hasRelatedWork W4245757257 @default.
- W2034650456 hasRelatedWork W4251099251 @default.
- W2034650456 hasRelatedWork W4311716393 @default.
- W2034650456 isParatext "false" @default.
- W2034650456 isRetracted "false" @default.
- W2034650456 magId "2034650456" @default.
- W2034650456 workType "article" @default.