Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034663451> ?p ?o ?g. }
- W2034663451 endingPage "280" @default.
- W2034663451 startingPage "207" @default.
- W2034663451 abstract "Plasma immersion ion implantation (PIII) is a cluster compatible doping and processing tool offering many inherent advantages over conventional beamline ion implantation. When first introduced in the late 1980s, the technique was primarily used to enhance the surface mechanical properties of metals. Recently, a substantial amount of research activities have focused on microelectronics and have led to a number of very interesting applications, such as the formation of shallow junction, synthesis of silicon-on-insulator, large area implantation, trench doping, conformal deposition, and so on. In this paper, we will review the principles of PIII, the dynamic sheath model for various kinds of plasma, reactor designs, recent applications in the area of microelectronics, as well as the future of PIII pertaining to semiconductor materials and processing." @default.
- W2034663451 created "2016-06-24" @default.
- W2034663451 creator A5009041573 @default.
- W2034663451 creator A5027419343 @default.
- W2034663451 creator A5043065335 @default.
- W2034663451 creator A5073481748 @default.
- W2034663451 creator A5082014065 @default.
- W2034663451 date "1996-11-01" @default.
- W2034663451 modified "2023-10-01" @default.
- W2034663451 title "Plasma immersion ion implantation—a fledgling technique for semiconductor processing" @default.
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