Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034669554> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2034669554 abstract "This paper outlines the design and performance of an oscillator that incorporates a new type of MEMS resonator. The MEMS resonator is similar in design to many other electrostatically actuated MEMS resonators in the literature. However, the novel aspect of the resonator is the use of electrothermal displacement sensors to capture its motion. Due to the high resolution of these sensors compared to other sensor technologies used in MEMS, there is the potential for oscillators using this type of resonators to have good phase noise performance. However, due to the low bandwidth of the sensors, only low frequency oscillators can be fabricated with this technology. Despite the differences in dynamics between typical electrostatic or piezoelectric transduced resonators, the oscillator topology using a feedback gain was found to be robust at sustaining oscillations. This was due to the interaction between the dynamics of the capacitive feedthrough and the mechanical system in the device. The frequency of the fabricated oscillator is 8844 Hz." @default.
- W2034669554 created "2016-06-24" @default.
- W2034669554 creator A5010341657 @default.
- W2034669554 creator A5061619957 @default.
- W2034669554 date "2013-11-01" @default.
- W2034669554 modified "2023-10-14" @default.
- W2034669554 title "MEMS based oscillator incorporating a displacement sensor" @default.
- W2034669554 cites W1571429142 @default.
- W2034669554 cites W1976119682 @default.
- W2034669554 cites W2018806435 @default.
- W2034669554 cites W2032538899 @default.
- W2034669554 cites W2082211203 @default.
- W2034669554 cites W2091474803 @default.
- W2034669554 cites W2097912213 @default.
- W2034669554 cites W2114008742 @default.
- W2034669554 cites W2125446851 @default.
- W2034669554 cites W2134762439 @default.
- W2034669554 cites W2136600760 @default.
- W2034669554 cites W2140743003 @default.
- W2034669554 cites W2151709552 @default.
- W2034669554 cites W2155273325 @default.
- W2034669554 cites W2161648307 @default.
- W2034669554 cites W2506282711 @default.
- W2034669554 doi "https://doi.org/10.1109/aucc.2013.6697263" @default.
- W2034669554 hasPublicationYear "2013" @default.
- W2034669554 type Work @default.
- W2034669554 sameAs 2034669554 @default.
- W2034669554 citedByCount "0" @default.
- W2034669554 crossrefType "proceedings-article" @default.
- W2034669554 hasAuthorship W2034669554A5010341657 @default.
- W2034669554 hasAuthorship W2034669554A5061619957 @default.
- W2034669554 hasConcept C119599485 @default.
- W2034669554 hasConcept C121332964 @default.
- W2034669554 hasConcept C122348159 @default.
- W2034669554 hasConcept C127413603 @default.
- W2034669554 hasConcept C192562407 @default.
- W2034669554 hasConcept C203597036 @default.
- W2034669554 hasConcept C206755178 @default.
- W2034669554 hasConcept C24326235 @default.
- W2034669554 hasConcept C24890656 @default.
- W2034669554 hasConcept C2776257435 @default.
- W2034669554 hasConcept C2777303812 @default.
- W2034669554 hasConcept C37977207 @default.
- W2034669554 hasConcept C41611521 @default.
- W2034669554 hasConcept C49040817 @default.
- W2034669554 hasConcept C76155785 @default.
- W2034669554 hasConcept C89631360 @default.
- W2034669554 hasConcept C97126364 @default.
- W2034669554 hasConceptScore W2034669554C119599485 @default.
- W2034669554 hasConceptScore W2034669554C121332964 @default.
- W2034669554 hasConceptScore W2034669554C122348159 @default.
- W2034669554 hasConceptScore W2034669554C127413603 @default.
- W2034669554 hasConceptScore W2034669554C192562407 @default.
- W2034669554 hasConceptScore W2034669554C203597036 @default.
- W2034669554 hasConceptScore W2034669554C206755178 @default.
- W2034669554 hasConceptScore W2034669554C24326235 @default.
- W2034669554 hasConceptScore W2034669554C24890656 @default.
- W2034669554 hasConceptScore W2034669554C2776257435 @default.
- W2034669554 hasConceptScore W2034669554C2777303812 @default.
- W2034669554 hasConceptScore W2034669554C37977207 @default.
- W2034669554 hasConceptScore W2034669554C41611521 @default.
- W2034669554 hasConceptScore W2034669554C49040817 @default.
- W2034669554 hasConceptScore W2034669554C76155785 @default.
- W2034669554 hasConceptScore W2034669554C89631360 @default.
- W2034669554 hasConceptScore W2034669554C97126364 @default.
- W2034669554 hasLocation W20346695541 @default.
- W2034669554 hasOpenAccess W2034669554 @default.
- W2034669554 hasPrimaryLocation W20346695541 @default.
- W2034669554 hasRelatedWork W1985227789 @default.
- W2034669554 hasRelatedWork W2007286867 @default.
- W2034669554 hasRelatedWork W2034669554 @default.
- W2034669554 hasRelatedWork W2060885779 @default.
- W2034669554 hasRelatedWork W2066307812 @default.
- W2034669554 hasRelatedWork W2113347661 @default.
- W2034669554 hasRelatedWork W2135347487 @default.
- W2034669554 hasRelatedWork W2540705003 @default.
- W2034669554 hasRelatedWork W2603134999 @default.
- W2034669554 hasRelatedWork W2791187474 @default.
- W2034669554 isParatext "false" @default.
- W2034669554 isRetracted "false" @default.
- W2034669554 magId "2034669554" @default.
- W2034669554 workType "article" @default.