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- W2034684046 abstract "Nanostructure of whiskers and hillocks in various aluminum (Al)-based thin films for thin-film transistor (TFT) on glass substrates has been investigated. We developed a novel technique to fabricate whiskers and hillocks artificially, using nanoindentation technique and annealing in a vacuum furnace. During the annealing, some Al whiskers and hillocks are formed, particularly on the edges of indentation marks. The high degree of whisker formation in this technique correlated to the weak hillock formation resistance in actual TFT arrays. Nanostructure of these thin films was investigated by cross-sectional transmission electron microscopy (X-TEM). The surface morphology of as-deposited films was also investigated by atomic force microscopy (AFM)." @default.
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- W2034684046 date "1998-01-01" @default.
- W2034684046 modified "2023-09-27" @default.
- W2034684046 title "Nanostructural investigation of whiskers and hillocks of Al-based metallization in thin-film transistor liquid crystal displays" @default.
- W2034684046 doi "https://doi.org/10.1063/1.54659" @default.
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