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- W2034688746 abstract "Abstract Pure hydrogenated microcrystalline silicon (μc-Si/H) films were deposited by SiF4–H2–He plasmas at temperatures as low as 120°C and frequencies of 13.56 and 75 MHz. The plasma diagnostics by optical emission spectroscopy has allowed us to control the growth of μc-Si/H films. The silicon structure can be changed from pure amorphous to pure microcrystalline under the controlled variation of the densities of F atoms, H atoms and SiFn radicals in the plasma phase." @default.
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- W2034688746 date "2001-02-01" @default.
- W2034688746 modified "2023-10-14" @default.
- W2034688746 title "From amorphous to microcrystalline silicon deposition in SiF4–H2–He plasmas: in situ control by optical emission spectroscopy" @default.
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- W2034688746 doi "https://doi.org/10.1016/s0040-6090(00)01584-4" @default.
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