Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034688803> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2034688803 endingPage "2395" @default.
- W2034688803 startingPage "2393" @default.
- W2034688803 abstract "Epitaxial HfSi2 has been grown locally on (001)Si. In samples annealed in one step at 1100 °C or in two steps at 450–1100 °C, islands of HfSi2 of 0.8 μm in average grain size were found to cover about 40% of the surface area. About 70% of the disilicide in areal fraction was found to be epitaxial silicide, 0.6–1.2 μm in size. The orientation relationships between epitaxial HfSi2 and (001)Si substrate were analyzed to be [010]HfSi2∥[001]Si and (002)HfSi2∥(220)Si (with about 1° misorientation). Interfacial dislocations, 75 Å in average spacing, were identified to be of edge type with 1/2〈110〉 Burgers vectors. No HfSi2 epitaxy was found to form on (111)Si." @default.
- W2034688803 created "2016-06-24" @default.
- W2034688803 creator A5039249789 @default.
- W2034688803 creator A5040127024 @default.
- W2034688803 creator A5073963645 @default.
- W2034688803 date "1987-03-15" @default.
- W2034688803 modified "2023-10-16" @default.
- W2034688803 title "Partial epitaxial growth of HfSi2 films grown on silicon" @default.
- W2034688803 cites W1970125705 @default.
- W2034688803 cites W1971605901 @default.
- W2034688803 cites W2004492892 @default.
- W2034688803 cites W2008374941 @default.
- W2034688803 cites W2017591482 @default.
- W2034688803 cites W2025638713 @default.
- W2034688803 cites W2036236387 @default.
- W2034688803 cites W2057071710 @default.
- W2034688803 cites W2064997152 @default.
- W2034688803 cites W2073003013 @default.
- W2034688803 cites W2087088517 @default.
- W2034688803 doi "https://doi.org/10.1063/1.337955" @default.
- W2034688803 hasPublicationYear "1987" @default.
- W2034688803 type Work @default.
- W2034688803 sameAs 2034688803 @default.
- W2034688803 citedByCount "11" @default.
- W2034688803 countsByYear W20346888032019 @default.
- W2034688803 countsByYear W20346888032021 @default.
- W2034688803 crossrefType "journal-article" @default.
- W2034688803 hasAuthorship W2034688803A5039249789 @default.
- W2034688803 hasAuthorship W2034688803A5040127024 @default.
- W2034688803 hasAuthorship W2034688803A5073963645 @default.
- W2034688803 hasConcept C110738630 @default.
- W2034688803 hasConcept C111368507 @default.
- W2034688803 hasConcept C121332964 @default.
- W2034688803 hasConcept C127313418 @default.
- W2034688803 hasConcept C171250308 @default.
- W2034688803 hasConcept C185592680 @default.
- W2034688803 hasConcept C191897082 @default.
- W2034688803 hasConcept C192562407 @default.
- W2034688803 hasConcept C26873012 @default.
- W2034688803 hasConcept C2777289219 @default.
- W2034688803 hasConcept C2778117898 @default.
- W2034688803 hasConcept C2779227376 @default.
- W2034688803 hasConcept C2780901251 @default.
- W2034688803 hasConcept C47908070 @default.
- W2034688803 hasConcept C49040817 @default.
- W2034688803 hasConcept C544956773 @default.
- W2034688803 hasConcept C8010536 @default.
- W2034688803 hasConcept C87976508 @default.
- W2034688803 hasConceptScore W2034688803C110738630 @default.
- W2034688803 hasConceptScore W2034688803C111368507 @default.
- W2034688803 hasConceptScore W2034688803C121332964 @default.
- W2034688803 hasConceptScore W2034688803C127313418 @default.
- W2034688803 hasConceptScore W2034688803C171250308 @default.
- W2034688803 hasConceptScore W2034688803C185592680 @default.
- W2034688803 hasConceptScore W2034688803C191897082 @default.
- W2034688803 hasConceptScore W2034688803C192562407 @default.
- W2034688803 hasConceptScore W2034688803C26873012 @default.
- W2034688803 hasConceptScore W2034688803C2777289219 @default.
- W2034688803 hasConceptScore W2034688803C2778117898 @default.
- W2034688803 hasConceptScore W2034688803C2779227376 @default.
- W2034688803 hasConceptScore W2034688803C2780901251 @default.
- W2034688803 hasConceptScore W2034688803C47908070 @default.
- W2034688803 hasConceptScore W2034688803C49040817 @default.
- W2034688803 hasConceptScore W2034688803C544956773 @default.
- W2034688803 hasConceptScore W2034688803C8010536 @default.
- W2034688803 hasConceptScore W2034688803C87976508 @default.
- W2034688803 hasIssue "6" @default.
- W2034688803 hasLocation W20346888031 @default.
- W2034688803 hasOpenAccess W2034688803 @default.
- W2034688803 hasPrimaryLocation W20346888031 @default.
- W2034688803 hasRelatedWork W1485660136 @default.
- W2034688803 hasRelatedWork W193437229 @default.
- W2034688803 hasRelatedWork W1968907284 @default.
- W2034688803 hasRelatedWork W1982635368 @default.
- W2034688803 hasRelatedWork W2020503418 @default.
- W2034688803 hasRelatedWork W2031003934 @default.
- W2034688803 hasRelatedWork W2052111573 @default.
- W2034688803 hasRelatedWork W2059986347 @default.
- W2034688803 hasRelatedWork W2079270301 @default.
- W2034688803 hasRelatedWork W2329726729 @default.
- W2034688803 hasVolume "61" @default.
- W2034688803 isParatext "false" @default.
- W2034688803 isRetracted "false" @default.
- W2034688803 magId "2034688803" @default.
- W2034688803 workType "article" @default.