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• W2034693644 abstract "A novel sensing mechanism for electrostatic MEMS that employs static bifurcation-based sensing and binary detection is demonstrated. It is implemented as an ethanol vapour sensor that exploits the static pull-in bifurcation. Sensor detection of 5 ppm of ethanol vapour in dry nitrogen, equivalent to a detectable mass of 165 pg, is experimentally demonstrated. Sensor robustness to external disturbances is also demonstrated. A closed-form expression for the sensitivity of statically detected electrostatic MEMS sensors is derived. It is shown that the sensitivity of static bifurcation-based binary electrostatic MEMS sensors represents an upper bound on the sensitivity of static detection for given sensor dimensions and material properties." @default.
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• W2034693644 date "2014-04-28" @default.
• W2034693644 modified "2023-09-27" @default.
• W2034693644 title "Binary MEMS gas sensors" @default.
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• W2034693644 doi "https://doi.org/10.1088/0960-1317/24/6/065007" @default.
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