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- W2034694725 abstract "We have developed a diaphragm piezoelectric microactuator. The diaphragm consists of a Pb(Zr, Ti)O 3 (PZT) thin film, electrode layers, an isolation layer and a Si substrate. The diaphragm is deflected by transverse stress in the PZT thin film which is fabricated by a sputtering and annealing process. The PZT thin film has a piezoelectric coefficient d 31 of -100 pC/N, which is comparable to that of bulk PZT. A diaphragm deflection of 3 µ m was obtained at an electric field of 16 V/µm." @default.
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- W2034694725 date "1996-09-01" @default.
- W2034694725 modified "2023-10-12" @default.
- W2034694725 title "Static Characteristics of Piezoelectric Thin Film Buckling Actuator" @default.
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- W2034694725 doi "https://doi.org/10.1143/jjap.35.5012" @default.
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