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• W2034711903 abstract "SU-8 resist was used as a core/cladding waveguide material to fabricate a Mach–Zehnder interferometer (MZI) for biochemical sensing. The refractive index of the SU-8 resist was fine-tuned with a Δn of 0.004 for single-mode transmission. The UV lithography processes of the SU-8 resist were also optimized to pattern the high resolution (1 μm) and high aspect ratio (AR = 6) Y-branch structure of the optical interferometer. Optical measurements reveal that the SU-8 MZI chip can efficiently transmit the NIR laser (λ = 1310 nm) with a total loss less than 6 dB. When one branch of the MZI is in contact with the analyte, the interfered intensity stabilizes after the soaking time exceeds 5 min. NaCl solution with a concentration of 10−9 g/l can be detected using the SU-8 MZI chip. In the future, the polymer MZI chip can be mass-produced by molding process (or the LIGA process). The low-cost, label-free, real-time and high-sensitivity MZI chip will benefit many applications related to biological, environmental and industrial detection." @default.
• W2034711903 created "2016-06-24" @default.
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• W2034711903 date "2005-05-01" @default.
• W2034711903 modified "2023-10-12" @default.
• W2034711903 title "UV-LIGA interferometer biosensor based on the SU-8 optical waveguide" @default.
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• W2034711903 doi "https://doi.org/10.1016/j.sna.2005.01.004" @default.
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