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- W2034725981 endingPage "410" @default.
- W2034725981 startingPage "399" @default.
- W2034725981 abstract "A new negative near-UV photoresist consisting of poly(N-(4-hydroxyphenyl) maleimidealt-p-trimethylisilylstyrene) (PHMS) and a naphthoquinonediazide ester was developed. PHMS was synthesized by solution free-radical polymerization of the comonomers with azobisisobutyronitrile (AIBN) in 1,4-dioxane at 60°C. The preparation of PHMS in terms of reaction time, thermal initiator, and solvent was evaluated; and a series of different molecular weight copolymers were prepared. PHMS was 1: 1 in composition and was predominantly alternating. These copolymers dissolved in a wide range of solvents (including 5% tetramethylammonium hydroxide). The thermal properties of these copolymers were investigated by DSC and TGA. The chain-stiffening effect of the maleimide group played an important role in effecting high thermal resistance. Near-UV exposure was carried out using a Canon PLA-501F contact printer. High resolution negative images were obtained which had resistance to thermal deformation at 330°C and above. The developed patterns exhibited good adhesion to the silicon substrates without the use of an adhesion promoter. The lithographic applications of a bilayer photoresist system in which the prepared resist was used as the top imaging layer were examined. It is supposed that if PHMS was used as a binder for a diazonaphthoquions sulfonate (NDS) photochemically, positive images would be obtained; however, on the contrary, negative images were observed. It is proposed that photocrosslinking occurred in the PHMS main chain." @default.
- W2034725981 created "2016-06-24" @default.
- W2034725981 creator A5013456062 @default.
- W2034725981 creator A5040429931 @default.
- W2034725981 date "1991-03-15" @default.
- W2034725981 modified "2023-10-12" @default.
- W2034725981 title "Preparation and properties of Si-containing copolymer for near-UV resist. I. Poly(N-(4-hydroxyphenyl) maleimidealt-p-trimethylisilylstyrene)" @default.
- W2034725981 doi "https://doi.org/10.1002/pola.1991.080290313" @default.
- W2034725981 hasPublicationYear "1991" @default.
- W2034725981 type Work @default.
- W2034725981 sameAs 2034725981 @default.
- W2034725981 citedByCount "16" @default.
- W2034725981 crossrefType "journal-article" @default.
- W2034725981 hasAuthorship W2034725981A5013456062 @default.
- W2034725981 hasAuthorship W2034725981A5040429931 @default.
- W2034725981 hasConcept C127413603 @default.
- W2034725981 hasConcept C134406635 @default.
- W2034725981 hasConcept C15920480 @default.
- W2034725981 hasConcept C178790620 @default.
- W2034725981 hasConcept C183882617 @default.
- W2034725981 hasConcept C185592680 @default.
- W2034725981 hasConcept C188027245 @default.
- W2034725981 hasConcept C192157962 @default.
- W2034725981 hasConcept C192562407 @default.
- W2034725981 hasConcept C2779227376 @default.
- W2034725981 hasConcept C2779342513 @default.
- W2034725981 hasConcept C2779887276 @default.
- W2034725981 hasConcept C2780127704 @default.
- W2034725981 hasConcept C2780995637 @default.
- W2034725981 hasConcept C41625074 @default.
- W2034725981 hasConcept C42360764 @default.
- W2034725981 hasConcept C521977710 @default.
- W2034725981 hasConcept C53524968 @default.
- W2034725981 hasConcept C55493867 @default.
- W2034725981 hasConcept C59061564 @default.
- W2034725981 hasConceptScore W2034725981C127413603 @default.
- W2034725981 hasConceptScore W2034725981C134406635 @default.
- W2034725981 hasConceptScore W2034725981C15920480 @default.
- W2034725981 hasConceptScore W2034725981C178790620 @default.
- W2034725981 hasConceptScore W2034725981C183882617 @default.
- W2034725981 hasConceptScore W2034725981C185592680 @default.
- W2034725981 hasConceptScore W2034725981C188027245 @default.
- W2034725981 hasConceptScore W2034725981C192157962 @default.
- W2034725981 hasConceptScore W2034725981C192562407 @default.
- W2034725981 hasConceptScore W2034725981C2779227376 @default.
- W2034725981 hasConceptScore W2034725981C2779342513 @default.
- W2034725981 hasConceptScore W2034725981C2779887276 @default.
- W2034725981 hasConceptScore W2034725981C2780127704 @default.
- W2034725981 hasConceptScore W2034725981C2780995637 @default.
- W2034725981 hasConceptScore W2034725981C41625074 @default.
- W2034725981 hasConceptScore W2034725981C42360764 @default.
- W2034725981 hasConceptScore W2034725981C521977710 @default.
- W2034725981 hasConceptScore W2034725981C53524968 @default.
- W2034725981 hasConceptScore W2034725981C55493867 @default.
- W2034725981 hasConceptScore W2034725981C59061564 @default.
- W2034725981 hasIssue "3" @default.
- W2034725981 hasLocation W20347259811 @default.
- W2034725981 hasOpenAccess W2034725981 @default.
- W2034725981 hasPrimaryLocation W20347259811 @default.
- W2034725981 hasRelatedWork W1967644046 @default.
- W2034725981 hasRelatedWork W2079587858 @default.
- W2034725981 hasRelatedWork W2080567549 @default.
- W2034725981 hasRelatedWork W2157898981 @default.
- W2034725981 hasRelatedWork W2361734361 @default.
- W2034725981 hasRelatedWork W2367215121 @default.
- W2034725981 hasRelatedWork W2368618132 @default.
- W2034725981 hasRelatedWork W3133124495 @default.
- W2034725981 hasRelatedWork W4223471701 @default.
- W2034725981 hasRelatedWork W4321180153 @default.
- W2034725981 hasVolume "29" @default.
- W2034725981 isParatext "false" @default.
- W2034725981 isRetracted "false" @default.
- W2034725981 magId "2034725981" @default.
- W2034725981 workType "article" @default.