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- W2034730418 abstract "In this work, the damage formation in InN layers has been investigated subsequent to europium implantation at 300 keV and room temperature. The layers of several micrometres were produced by hydride vapour phase epitaxy and used as matrices for ion implantation experiments due to their good crystalline quality. From this investigation, it is shown that InN exhibits a low stability under rare earth ion implantation. Starting at a low fluence of around 5 × 10 12 Eu cm −2 , an extensive modification of the surface layer takes place. The dissociation of InN and the presence of misoriented nanograins are observed in the damaged area. Analysis by electron diffraction indicates that the nanograins correspond to indium oxide In 2 O 3 ." @default.
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- W2034730418 date "2011-06-30" @default.
- W2034730418 modified "2023-09-25" @default.
- W2034730418 title "The high sensitivity of InN under rare earth ion implantation at medium range energy" @default.
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- W2034730418 doi "https://doi.org/10.1088/0022-3727/44/29/295402" @default.
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