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- W2034752180 abstract "An integrated optical technique for interrogating the height of a suspended micro-electro-mechanical systems (MEMS) beam is demonstrated. This technique is highly sensitive, and capable of using WDM techniques to interrogate the height information of large arrays of beams. Our experimental results show a 7 dB change in the transmitted optical power when the beam height changes by 100 nm. It is predicted that this device will be able to measure the height to a shot-noise limited deflection noise density (DND) of 4 fm/√Hz." @default.
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- W2034752180 date "2012-08-01" @default.
- W2034752180 modified "2023-09-25" @default.
- W2034752180 title "Demonstration of a method for detecting MEMS suspended beam height" @default.
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- W2034752180 doi "https://doi.org/10.1109/omems.2012.6318817" @default.
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