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- W2034756371 abstract "An actuation system is described which utilizes a single active ZnO piezoelectric thin film deposited onto a silicon cantilever. The method for obtaining films for effective actuation by r.f. magnetron sputtering is discussed. The actuator has been incorporated into a system which enables unwanted vibrations of the cantilever to be cancelled, whilst maintaining the ability simultaneously to deflect the cantilever as required." @default.
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- W2034756371 date "1997-10-01" @default.
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- W2034756371 title "The use of sputtered ZnO piezoelectric thin films as broad-band microactuators" @default.
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