FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034779198> ?p ?o ?g. }

• W2034779198 endingPage "343" @default.
• W2034779198 startingPage "338" @default.
• W2034779198 abstract "The films of SiOxNy were deposited in an integrated distributed electron cyclotron resonance reactor. Due to planar geometry, such deposition processes can be scaled-up for processing of large areas. Deposition kinetics and material properties were studied in order to find the common principles for obtaining faster growth rates and more uniform deposition of high quality films. Films were grown without bias at room temperature from mixtures of SiH4, O2, and N2 at high deposition rates (more than 4.5 nm/s for silica). Optical properties of the films were analyzed using ultraviolet (UV)-visible and infrared spectroscopic ellipsometry. The influence of gas flows, temperature, pressure, microwave power, and rf bias was investigated. A multilayer optical filter was grown on a polycarbonate substrate using a UV-visible ellipsometer to control the deposition process. The success of this test confirms the accuracy of the experimental results and shows high promise for the technology." @default.
• W2034779198 created "2016-06-24" @default.
• W2034779198 creator A5010597793 @default.
• W2034779198 creator A5052833091 @default.
• W2034779198 creator A5053348069 @default.
• W2034779198 creator A5067440332 @default.
• W2034779198 creator A5073033260 @default.
• W2034779198 creator A5028068894 @default.
• W2034779198 date "2002-03-01" @default.
• W2034779198 modified "2023-10-18" @default.
• W2034779198 title "Deposition of silicon alloys in an integrated distributed electron cyclotron resonance reactor: Oxide, nitride, oxinitrides, and multilayer structures" @default.
• W2034779198 cites W1963908454 @default.
• W2034779198 cites W1965872011 @default.
• W2034779198 cites W1968961957 @default.
• W2034779198 cites W1982488675 @default.
• W2034779198 cites W1984920237 @default.
• W2034779198 cites W1986191697 @default.
• W2034779198 cites W2002454029 @default.
• W2034779198 cites W2003769541 @default.
• W2034779198 cites W2004438865 @default.
• W2034779198 cites W2006472383 @default.
• W2034779198 cites W2014841449 @default.
• W2034779198 cites W2039652602 @default.
• W2034779198 cites W2040494460 @default.
• W2034779198 cites W2059623550 @default.
• W2034779198 cites W2075856882 @default.
• W2034779198 cites W2080641070 @default.
• W2034779198 cites W2083190010 @default.
• W2034779198 cites W2086257431 @default.
• W2034779198 cites W2219205550 @default.
• W2034779198 cites W3146732660 @default.
• W2034779198 cites W4365787421 @default.
• W2034779198 doi "https://doi.org/10.1116/1.1445158" @default.
• W2034779198 hasPublicationYear "2002" @default.
• W2034779198 type Work @default.
• W2034779198 sameAs 2034779198 @default.
• W2034779198 citedByCount "5" @default.
• W2034779198 crossrefType "journal-article" @default.
• W2034779198 hasAuthorship W2034779198A5010597793 @default.
• W2034779198 hasAuthorship W2034779198A5028068894 @default.
• W2034779198 hasAuthorship W2034779198A5052833091 @default.
• W2034779198 hasAuthorship W2034779198A5053348069 @default.
• W2034779198 hasAuthorship W2034779198A5067440332 @default.
• W2034779198 hasAuthorship W2034779198A5073033260 @default.
• W2034779198 hasConcept C111368507 @default.
• W2034779198 hasConcept C113196181 @default.
• W2034779198 hasConcept C121332964 @default.
• W2034779198 hasConcept C127313418 @default.
• W2034779198 hasConcept C147120987 @default.
• W2034779198 hasConcept C151730666 @default.
• W2034779198 hasConcept C171250308 @default.
• W2034779198 hasConcept C175361016 @default.
• W2034779198 hasConcept C18293161 @default.
• W2034779198 hasConcept C185592680 @default.
• W2034779198 hasConcept C19067145 @default.
• W2034779198 hasConcept C192562407 @default.
• W2034779198 hasConcept C2777289219 @default.
• W2034779198 hasConcept C2777431650 @default.
• W2034779198 hasConcept C2816523 @default.
• W2034779198 hasConcept C43617362 @default.
• W2034779198 hasConcept C49040817 @default.
• W2034779198 hasConcept C544956773 @default.
• W2034779198 hasConcept C57410435 @default.
• W2034779198 hasConcept C62520636 @default.
• W2034779198 hasConcept C64297162 @default.
• W2034779198 hasConcept C86803240 @default.
• W2034779198 hasConceptScore W2034779198C111368507 @default.
• W2034779198 hasConceptScore W2034779198C113196181 @default.
• W2034779198 hasConceptScore W2034779198C121332964 @default.
• W2034779198 hasConceptScore W2034779198C127313418 @default.
• W2034779198 hasConceptScore W2034779198C147120987 @default.
• W2034779198 hasConceptScore W2034779198C151730666 @default.
• W2034779198 hasConceptScore W2034779198C171250308 @default.
• W2034779198 hasConceptScore W2034779198C175361016 @default.
• W2034779198 hasConceptScore W2034779198C18293161 @default.
• W2034779198 hasConceptScore W2034779198C185592680 @default.
• W2034779198 hasConceptScore W2034779198C19067145 @default.
• W2034779198 hasConceptScore W2034779198C192562407 @default.
• W2034779198 hasConceptScore W2034779198C2777289219 @default.
• W2034779198 hasConceptScore W2034779198C2777431650 @default.
• W2034779198 hasConceptScore W2034779198C2816523 @default.
• W2034779198 hasConceptScore W2034779198C43617362 @default.
• W2034779198 hasConceptScore W2034779198C49040817 @default.
• W2034779198 hasConceptScore W2034779198C544956773 @default.
• W2034779198 hasConceptScore W2034779198C57410435 @default.
• W2034779198 hasConceptScore W2034779198C62520636 @default.
• W2034779198 hasConceptScore W2034779198C64297162 @default.
• W2034779198 hasConceptScore W2034779198C86803240 @default.
• W2034779198 hasIssue "2" @default.
• W2034779198 hasLocation W20347791981 @default.
• W2034779198 hasOpenAccess W2034779198 @default.
• W2034779198 hasPrimaryLocation W20347791981 @default.
• W2034779198 hasRelatedWork W1860953524 @default.
• W2034779198 hasRelatedWork W1968277604 @default.
• W2034779198 hasRelatedWork W1994667595 @default.
• W2034779198 hasRelatedWork W1994949098 @default.
• W2034779198 hasRelatedWork W2021783135 @default.
• W2034779198 hasRelatedWork W2086987328 @default.

• next