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- W2034779523 abstract "Density functional theory calculations and molecular dynamics simulations are used to decouple the influence of strain and the effect of germanium content on the diffusivity of intrinsic defects and group-V dopants in strained Si and SiGe materials. Vacancy diffusivities increase with increasing germanium content. In contrast, interstitial diffusivities in SiGe remain roughly constant until the germanium content reaches 25% and then decrease. Tensile strain increases interstitial-assisted dopant diffusivity and decreases vacancy-assisted diffusivity. Germanium reduces interstitial diffusivity in a manner controlled by dopant V size but assists vacancy diffusivity (lowering formation energies by ∼0.2eV)." @default.
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- W2034779523 date "2006-04-24" @default.
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- W2034779523 title "Effects of Ge content on the diffusion of group-V dopants in SiGe alloys" @default.
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- W2034779523 doi "https://doi.org/10.1063/1.2198096" @default.
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