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• W2034843439 abstract "The in situ excimer-laser deposition process is demonstrated, for the first time, to be an effective technique for producing superconducting films on both sides of substrate wafers of up to 5 cm in diameter. By exploiting the directed nature of the laser produced plume and controlling its off-axis composition, thickness and stoichiometric variations of less than ±5% have been obtained over the entire surface. Coatings on 5-cm-diam LaAlO3 substrates have uniform transition temperatures of ≥ (R18)90 K on both sides, with a critical current density at 77 K and zero field of 2.5×106 A/cm2. The 10 GHz surface resistance for samples cut from a 5 cm wafer is 40–60 μΩ at 4 K." @default.
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• W2034843439 date "1991-09-09" @default.
• W2034843439 modified "2023-10-18" @default.
• W2034843439 title "Large‐area, two‐sided superconducting YBa2Cu3O7−xfilms deposited by pulsed laser deposition" @default.
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• W2034843439 doi "https://doi.org/10.1063/1.105313" @default.
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